A versatile metal-halide vapor chemistry for the epitaxial growth of metallic, insulating and semiconducting films

Henderson, Walter; Calley, W. Laws; Carver, Alexander G.; Chen, Hang; Doolittle, W. Alan

doi:10.1016/j.jcrysgro.2011.03.049

Cited by 19 publications

(15 citation statements)

References 21 publications

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“…18 E g (0) for the 10% maximum intensity fit is 1.91 eV matching the calculated band gap. 4 The ratios a/b are, respectively, 1.63 Â 10 À6 and 1.32 Â 10 À6 for these two fits, consistent with other semiconductor materials such as 7.4 Â 10 À7 for silicon and 2.7 Â 10 À6 for GaAs.…”

Section: B Temperature Dependencesupporting

confidence: 71%

Evidence of ion intercalation mediated band structure modification and opto-ionic coupling in lithium niobite

Shank

Tellekamp

Doolittle

2015

Journal of Applied Physics

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The theoretically suggested band structure of the novel p-type semiconductor lithium niobite (LiNbO2), the direct coupling of photons to ion motion, and optically induced band structure modifications are investigated by temperature dependent photoluminescence. LiNbO2 has previously been used as a memristor material but is shown here to be useful as a sensor owing to the electrical, optical, and chemical ease of lithium removal and insertion. Despite the high concentration of vacancies present in lithium niobite due to the intentional removal of lithium atoms, strong photoluminescence spectra are observed even at room temperature that experimentally confirm the suggested band structure implying transitions from a flat conduction band to a degenerate valence band. Removal of small amounts of lithium significantly modifies the photoluminescence spectra including additional larger than stoichiometric-band gap features. Sufficient removal of lithium results in the elimination of the photoluminescence response supporting the predicted transition from a direct to indirect band gap semiconductor. In addition, non-thermal coupling between the incident laser and lithium ions is observed and results in modulation of the electrical impedance.

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Section: B Temperature Dependencesupporting

confidence: 71%

Evidence of ion intercalation mediated band structure modification and opto-ionic coupling in lithium niobite

Shank

Tellekamp

Doolittle

2015

Journal of Applied Physics

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“…The details of the metal halide growth chemistry are described elsewhere [10], but in general, the chemistry relies on a series of chemical reactions to form both crystalline metals and oxides. Primarily, lithium getters chlorine from the metal chloride species to produce both LiCl and the metal species.…”

Section: Introductionmentioning

confidence: 99%

Halide based MBE of crystalline metals and oxides

Greenlee

Calley

Henderson

et al. 2011

Phys. Status Solidi C

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A halide based growth chemistry has been demonstrated which can deliver a range of transition metals using low to moderate effusion cell temperatures (30‐700 °C) even for high melting point metals. Previously, growth with transition metal species required difficult to control electron beam or impurity inducing metal organic sources. Both crystalline oxide and metal films exhibiting excellent crystal quality are grown using this halide‐based growth chemistry. Films are grown using a plasma assisted Molecular Beam Epitaxy (MBE) system with metal‐chloride precursors. Crystalline niobium, cobalt, iron, and nickel were grown using this chemistry but the technology can be generalized to almost any metal for which a chloride precursor is available. Additionally, the oxides LiNbO3 and LiNbO2 were grown with films exhibiting X‐ray diffraction (XRD) rocking curve full‐widths at half maximum of 150 and 190 arcseconds respectively. LiNbO2 films demonstrate a memristive response due to the rapid movement of lithium in the layered crystal structure. The rapid movement of lithium ions in LiNbO2 memristors is characterized using impedance spectroscopy measurements. The impedance spectroscopy measurements suggest an ionic current of.1 mA for a small drive voltage of 5 mV AC or equivalently an ionic current density of ∼87 A/cm2. This high ionic current density coupled with low charge transfer resistance of ∼16.5 Ω and a high relaxation frequency (6.6 MHz) makes this single crystal material appealing for battery applications in addition to memristors. (© 2012 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

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“…5 Although these authors succeeded in achieving epitaxial LiNbO 3 films, after publishing two papers, 5,6 they left the field they had started, never to return. This has perhaps more to do with their choice of compound-LiNbO 3 is notoriously difficult to grow 7 -than oxide MBE itself. Spurred by the discovery of hightemperature superconductivity, 8,9 oxide MBE has since been used to grow the oxide superconductors DyBa 2 Cu 3 O 7−δ , [10][11][12][13] The configuration of a MBE system for the growth of multicomponent oxides differs in several important ways from today's more conventional MBE systems designed for the growth of semiconductors.…”

mentioning

confidence: 99%

Perspective: Oxide molecular-beam epitaxy rocks!

Schlom

2015

APL Materials

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Molecular-beam epitaxy (MBE) is the “gold standard” synthesis technique for preparing semiconductor heterostructures with high purity, high mobility, and exquisite control of layer thickness at the atomic-layer level. Its use for the growth of multicomponent oxides got off to a rocky start 30 yr ago, but in the ensuing decades, it has become the definitive method for the preparation of oxide heterostructures too, particularly when it is desired to explore their intrinsic properties. Examples illustrating the unparalleled achievements of oxide MBE are given; these motivate its expanding use for exploring the potentially revolutionary states of matter possessed by oxide systems.

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A versatile metal-halide vapor chemistry for the epitaxial growth of metallic, insulating and semiconducting films

Cited by 19 publications

References 21 publications

Evidence of ion intercalation mediated band structure modification and opto-ionic coupling in lithium niobite

Evidence of ion intercalation mediated band structure modification and opto-ionic coupling in lithium niobite

Halide based MBE of crystalline metals and oxides

Perspective: Oxide molecular-beam epitaxy rocks!

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