A Very Low Loss 220–325 GHz Silicon Micromachined Waveguide Technology

Beuerle, Bernhard; Campion, James; Shah, Umer; Oberhammer, Joachim

doi:10.1109/tthz.2018.2791841

Cited by 77 publications

(58 citation statements)

References 11 publications

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“…8. The measured insertion loss for the waveguide section ranges from 0.032 to 0.044 dB/mm, which is in good agreement with previously reported micromachined waveguides in the same frequency range [17].…”

Section: Interposer Characterizationsupporting

confidence: 91%

“…3). Chip 2 forms the upper broad-wall of the H-plane split waveguides (as described in [17]) and contains the access ports. The total thickness of the interposer is 0.6 mm, and each chip has three etched silicon layers that are used in the design for impedance matching.…”

Section: Interposermentioning

confidence: 99%

“…These cited works have demonstrated complex and low-loss waveguide geometries, MEMS integration, or system-on-chip architectures. The authors have recently introduced a very low-loss micromachined waveguide technology (0.02-0.07 dB/mm in the 220-330-GHz band, [17]), which is a near-ideal candidate for routing waveguide signals in micromachined test fixtures.…”

Section: Introductionmentioning

confidence: 99%

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Micromachined Waveguide Interposer for the Characterization of Multi-port Sub-THz Devices

Gomez-Torrent

Oberhammer

2020

J Infrared Milli Terahz Waves

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This paper reports for the first time on a micromachined interposer platform for characterizing highly miniaturized multi-port sub-THz waveguide components. The reduced size of such devices does often not allow to connect them to conventional waveguide flanges. We demonstrate the micromachined interposer concept by characterizing a miniaturized, three-port, 220-330-GHz turnstile orthomode transducer. The interposer contains low-loss micromachined waveguides for routing the ports of the device under test to standard waveguide flanges and integrated micromachined matched loads for terminating the unused ports. In addition to the interposer, the measurement setup consists of a micromachined square-to-rectangular waveguide transition. These two devices enable the characterization of such a complex microwave component in four different configurations with a standard two-port measurement setup. In addition, the design of the interposer allows for independent characterization of its sub-components and, thus, for accurate de-embedding from the measured data, as demonstrated in this paper. The measurement setup can be custom-designed for each silicon micromachined device under test and co-fabricated in the same wafer due to the batch nature of this process. The solution presented here avoids the need of CNC-milled test-fixtures or waveguide pieces that deteriorate the performance of the device under test and reduce the measurement accuracy.

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Section: Interposer Characterizationsupporting

confidence: 91%

Section: Interposermentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Micromachined Waveguide Interposer for the Characterization of Multi-port Sub-THz Devices

Gomez-Torrent

Oberhammer

2020

J Infrared Milli Terahz Waves

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“…The resulting SOI based shim provides excellent ohmic contact between the shim and waveguide flange. The shims are fabricated using a process similar to that described in [11]. Using oxide hard masks, the waveguide opening is patterned in the device layer (DL) of the SOI wafer while the circular recess to accept the inner flange boss is patterned its handle layer (HL), (Fig.…”

Section: Calibration Shim Design and Fabricationmentioning

confidence: 99%

Silicon-Micromachined Waveguide Calibration Shims for Terahertz Frequencies

Campion

Shah

Oberhammer

2019

2019 IEEE MTT-S International Microwave Symposium (IMS)

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“…The absorbers are integrated in a low-loss micromachined waveguide technology available at KTH [7] consisting of a silicon-wafer triple stack in a double H-plane split configuration, with the central wafer being 275 µm thick and etched by deep-reactive ion etching. The waveguide height is only 66 % of the full-height (432 µm).…”

Section: Designmentioning

confidence: 99%

Integrated micromachined waveguide absorbers at 220–325 GHz

Beuerle

Campion

Shah

et al. 2017

2017 47th European Microwave Conference (EuMC)

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Abstract-This paper presents the characterization of integrated micromachined waveguide absorbers in the frequency band of 220 to 325 GHz. Tapered absorber wedges were cut out of four different commercially available semi-rigid absorber materials and inserted in a backshorted micromachined waveguide cavity for characterization. The absorption properties of these materials are only specified at 10 GHz, and their absorption behavior above 100 GHz was so far unknown. To study the effect of the geometry of the absorber wedges, the return loss of different absorber lengths and tapering angles was investigated. The results show that longer and sharper sloped wedges from the material specified with the lowest dielectric constant, but not the highest specified absorption, are superior over other geometries and absorber materials. The best results were achieved for 5 mm long absorbers with a tapering angle of 23• in the material RS-4200 from the supplier Resin Systems, having a return loss of better than 13 dB over the whole frequency range of 220 to 325 GHz. These absorber wedges are intended to be used as matched loads in micromachined waveguide circuits. To the best of our knowledge, this is the first publication characterizing such micromachined waveguide absorbers.

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A Very Low Loss 220–325 GHz Silicon Micromachined Waveguide Technology

Abstract: This is the accepted version of a paper published in IEEE Transactions on Terahertz Science and Technology. This paper has been peer-reviewed but does not include the final publisher proof-corrections or journal pagination.

Cited by 77 publications

References 11 publications

Micromachined Waveguide Interposer for the Characterization of Multi-port Sub-THz Devices

Micromachined Waveguide Interposer for the Characterization of Multi-port Sub-THz Devices

Silicon-Micromachined Waveguide Calibration Shims for Terahertz Frequencies

Integrated micromachined waveguide absorbers at 220–325 GHz

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