A “water window” tomography based on a laser-plasma double-stream gas-puff target soft X-ray source

Wachulak, P.; Torrisi, A.; Krauze, Wojciech; Bartnik, A.; Kostecki, J.; Sciortino, Andrea; Fiedorowicz, Henryk

doi:10.1007/s00340-019-7183-2

Cited by 18 publications

(18 citation statements)

References 42 publications

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“…The experiments with the synchrotron radiation offer the most versatile controlling of the wavelength. By its [27], (7) [41,42], and (8) e.g., ΔE = 20 − 280 eV [36], ΔE = 250 − 3000 eV [43], XCT approach Δ (nm) Axial (3) resolution Photon flux (ph/s) Comments High flux widely tunable energy range 4.43 -2.34 7 (5) nature, the synchrotron radiation typically delivers monochromatic radiation ranging from VUV to hard X-ray at high flux ( 10 11 ph/s).…”

Section: Discussionmentioning

confidence: 99%

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Coherence tomography with broad bandwidth extreme ultraviolet and soft X-ray radiation

et al. 2021

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We present an overview of recent results on optical coherence tomography with the use of extreme ultraviolet and soft X-ray radiation (XCT). XCT is a cross-sectional imaging method that has emerged as a derivative of optical coherence tomography (OCT). In contrast to OCT, which typically uses near-infrared light, XCT utilizes broad bandwidth extreme ultraviolet (XUV) and soft X-ray (SXR) radiation (Fuchs et al in Sci Rep 6:20658, 2016). As in OCT, XCT’s axial resolution only scales with the coherence length of the light source. Thus, an axial resolution down to the nanometer range can be achieved. This is an improvement of up to three orders of magnitude in comparison to OCT. XCT measures the reflected spectrum in a common-path interferometric setup to retrieve the axial structure of nanometer-sized samples. The technique has been demonstrated with broad bandwidth XUV/SXR radiation from synchrotron facilities and recently with compact laboratory-based laser-driven sources. Axial resolutions down to 2.2 nm have been achieved experimentally. XCT has potential applications in three-dimensional imaging of silicon-based semiconductors, lithography masks, and layered structures like XUV mirrors and solar cells.

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Section: Discussionmentioning

confidence: 99%

“…They require relatively low-cost and very stable nanosecond drivers. These sources deliver enough photons ( 10 10 ph/s) in the water window to enable laboratory-sized SXR imaging [41,42]. Further increasing of the photon flux of LPS sources can be realized using high-repetition rate nanosecond drivers.…”

Section: Discussionmentioning

confidence: 99%

Coherence tomography with broad bandwidth extreme ultraviolet and soft X-ray radiation

et al. 2021

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“…The SXR equipment was later improved in order to acquire 3D images, i.e., topography of the samples [59]. An Nd:YAG (YG981, from Quantel, MT, USA), with a pulse duration of 8 ns, 20 Hz repetition rate, and an energy of 1.5 J was employed.…”

Section: Sxr Tomography and 3d Imagingmentioning

confidence: 99%

“…The system was equipped with a piezoelectric translation stage (Q-545.240, travel range of 26 mm, 1 nm resolution, and bidirectional repeatability of ±18 nm) and a rotation stage (Q-632.930, rotation range >360 • , 0.75 µrad sensor resolution, and unidirectional repeatability 6 µrad), from Pi miCos, to move the sample to observe with nanometric precision. Thus, according to the type of sample to observe, two different sample holders, machined ad hoc, can be mounted inside the chamber: a tip-holder (Figure 11c), on the top of which it is possible to place samples in granular form, and a slit-holder (Figure 11d), having a width of 0.21 mm and a depth of 1 mm, which can host a standard TEM Si 3 N 4 membrane (typically 30 nm thick), on the top of which are typically deposited a few drops of a liquid sample [59]. The slit-holder, having a slot 0.5 mm deep and 0.5 mm wide, ensures that the Si 3 N 4 membrane can be visible for a large range of rotation angles.…”

Section: Sxr Tomography and 3d Imagingmentioning

confidence: 99%

“…The double stream gas-puff target source represents a versatile alternative to perform experiments in small academic laboratories without the necessity to access to large-scale facilities, and can be regarded as complementary diagnostic tools for high spatial resolution imaging, obtaining additional information about the objects not directly available using other microscopy techniques. The laser-plasma source based on a double stream gas-puff target was successfully employed, thus far, for different applications [50], such as for shadowgraphy systems [51], radiography [52], radiobiology [53], photoionization [54], metrology [55], plasma channel studies [56] and, as will be shown extensively, imaging experiments [57][58][59].…”

Section: Introductionmentioning

confidence: 99%

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Biological Applications of Short Wavelength Microscopy Based on Compact, Laser-Produced Gas-Puff Plasma Source

et al. 2020

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Over the last decades, remarkable efforts have been made to improve the resolution in photon-based microscopes. The employment of compact sources based on table-top laser-produced soft X-ray (SXR) in the “water window” spectral range (λ = 2.3–4.4 nm) and extreme ultraviolet (EUV) plasma allowed to overcome the limitations imposed by large facilities, such as synchrotrons and X-ray free electron lasers (XFEL), because of their high complexity, costs, and limited user access. A laser-plasma double stream gas-puff target source represents a powerful tool for microscopy operating in transmission mode, significantly improving the spatial resolution into the nanometric scale, comparing to the traditional visible light (optical) microscopes. Such an approach allows generating the plasma efficiently, without debris, providing a high flux of EUV and SXR photons. In this review, we present the development and optimization of desktop imaging systems: a EUV and an SXR full field microscope, allowing to achieve a sub-50 nm spatial resolution with short exposure time and an SXR contact microscope, capable to resolve internal structures in a thin layer of sensitive photoresist. Details about the source, as well as imaging results for biological applications, will be presented and discussed.

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Investigation of extreme ultraviolet spectra from highly charged holmium ions in 1 μ m laser-produced plasmas

Wu¹,

Kawasaki²,

Shimada³

et al. 2020

J. Phys. B: At. Mol. Opt. Phys.

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Absolute intensity calibrated extreme ultraviolet spectra radiated by highly charged holmium (Ho) ions from 1 μm Nd:YAG laser generated plasmas in the 1–8 nm wavelength spectral range were measured and investigated. The spectral features show a broad structured continuum-like emission band, most prominent in the wavelength range 6–8 nm, which accounts for more than half of the emitted power. Assuming local thermodynamic equilibrium (LTE) in the laser produced plasmas and using the flexible atomic code and Cowan suite of codes, the wavelengths and LTE-gA values of unresolved transition arrays (UTAs) from E 1-contributing transition arrays 4p–4d, 4d–4f and super transition arrays such as 4p64d k−14f + 4p54d k+1–4p64d k−24f2 + 4p44d k+2 + 4p54d k 4f and 4d10(5s5p) k 4f m−k –4d9(5s5p) k 4f m−k+1 were calculated and shown to be responsible for the strongest observed spectral structure. Transitions between these excited to excited states are considered, since even if only weakly present, they will not be influenced by opacity effects unlike resonance transitions involving ground configurations. Another two intense continuous emission bands at 3–6 nm and 2–3 nm that dominate the spectra in the shorter wavelength range mainly arise from 4d–5p, 4d5s–4d5s5p, 4f–5g, 4f5s–4f5s5g and 4d–5f, 4d5s–4d5s5f, 4p–5s transitions. Spectral line shape parameters of Gaussian fits to the LTE-gA weighted radiation spectra of each Ho ion were given, enabling direct explanation of recorded spectra. Based on the LTE-gA UTAs formalism parameters, reasonable agreement is obtained between the synthetic spectrum and experimental result enabling some of the observed spectral features to be identified.

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A “water window” tomography based on a laser-plasma double-stream gas-puff target soft X-ray source

Cited by 18 publications

References 42 publications

Coherence tomography with broad bandwidth extreme ultraviolet and soft X-ray radiation

Coherence tomography with broad bandwidth extreme ultraviolet and soft X-ray radiation

Biological Applications of Short Wavelength Microscopy Based on Compact, Laser-Produced Gas-Puff Plasma Source

Investigation of extreme ultraviolet spectra from highly charged holmium ions in 1 μ m laser-produced plasmas

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