Scientific and technological progress depend substantially on the
ability to image on the nanoscale. In order to investigate complex,
functional, nanoscopic structures like, e.g., semiconductor devices,
multilayer optics, or stacks of 2D materials, the imaging techniques
not only have to provide images but should also provide quantitative
information. We report the material-specific characterization of
nanoscopic buried structures with extreme ultraviolet coherence
tomography. The method is demonstrated at a laser-driven broadband
extreme ultraviolet radiation source, based on high-harmonic
generation. We show that, besides nanoscopic axial resolution, the
spectral reflectivity of all layers in a sample can be obtained using
algorithmic phase reconstruction. This provides localized,
spectroscopic, material-specific information of the sample. The method
can be applied in, e.g., semiconductor production, lithographic mask
inspection, or quality control of multilayer fabrication. Moreover, it
paves the way for the investigation of ultrafast nanoscopic effects at
functional buried interfaces.
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