Optical coherence tomography with nanoscale axial resolution using a laser-driven high-harmonic source

Fuchs, Silvio; Wünsche, Martin; Nathanael, Jan; Abel, Johann J.; Rödel, Christian; Biedermann, Julius; Reinhard, Julius; Hübner, Uwe; Paulus, Gerhard G.

doi:10.1364/optica.4.000903

Cited by 42 publications

(23 citation statements)

References 28 publications

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“…In the common-path Fourier-domain XCT setup only the reflected spectral intensity can be measured. Therefore, the phase information is lost [22] . Assuming that the field of the radiation source is: the reflected field is defined as:…”

Section: Principle Of Axial Imagingmentioning

confidence: 99%

“…The latter one is referred to as an artifact or "ghost peak". However, a recently developed iterative three-step phase-retrieval algorithm (PR-XCT) [22] based on a Gerchberg-Saxton [33] and a hybrid input-output approach [34] can be used to computationally reconstruct the unknown phase. Thus, the algorithm is capable of an unambiguous reconstruction of the sample's axial structure by eliminating the artifacts very efficiently.…”

Section: Principle Of Axial Imagingmentioning

confidence: 99%

“…The first proof-of-concept experiment was performed with synchrotron radiation [18]. Later, XCT has as well be realized using laser-based high-harmonic generation (HHG) [22] and laser-plasma sources (LPS) [23].…”

Section: Radiation Sourcesmentioning

confidence: 99%

“…Although the applicability of synchrotron-based imaging methods is limited due to troublesome accessibility of the large-scale facilities, it has been shown that three-dimensional imaging of axial nanostructures is feasible [18]. However, in recent years, the rapid development of extremely broad bandwidth laser-driven XUV and SXR sources using the high-harmonic generation (HHG) [19] and laser-plasma sources (LPS) [20,21] has facilitated the realization of XCT at a laboratory scale [22,23].…”

Section: Introductionmentioning

confidence: 99%

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Coherence tomography with broad bandwidth extreme ultraviolet and soft X-ray radiation

et al. 2021

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We present an overview of recent results on optical coherence tomography with the use of extreme ultraviolet and soft X-ray radiation (XCT). XCT is a cross-sectional imaging method that has emerged as a derivative of optical coherence tomography (OCT). In contrast to OCT, which typically uses near-infrared light, XCT utilizes broad bandwidth extreme ultraviolet (XUV) and soft X-ray (SXR) radiation (Fuchs et al in Sci Rep 6:20658, 2016). As in OCT, XCT’s axial resolution only scales with the coherence length of the light source. Thus, an axial resolution down to the nanometer range can be achieved. This is an improvement of up to three orders of magnitude in comparison to OCT. XCT measures the reflected spectrum in a common-path interferometric setup to retrieve the axial structure of nanometer-sized samples. The technique has been demonstrated with broad bandwidth XUV/SXR radiation from synchrotron facilities and recently with compact laboratory-based laser-driven sources. Axial resolutions down to 2.2 nm have been achieved experimentally. XCT has potential applications in three-dimensional imaging of silicon-based semiconductors, lithography masks, and layered structures like XUV mirrors and solar cells.

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Section: Principle Of Axial Imagingmentioning

confidence: 99%

Section: Principle Of Axial Imagingmentioning

confidence: 99%

Section: Radiation Sourcesmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Coherence tomography with broad bandwidth extreme ultraviolet and soft X-ray radiation

et al. 2021

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“…In the EUV/SXR range two possible transmission windows for XCT has been identified: a silicon window (λ = 12–40 nm), dedicated for material science applications, and a well-known “water-window”, dedicated for biology (λ = 2.3–4.4 nm). So far, XCT allowed one to obtain axial resolution of 18 nm in the EUV range, down to 8 nm in the “water-window” range employing a synchrotron source 8 , and 24 nm resolution using an HHG source 9 . XCT in the “water-window” allows resolving in-depth structures of the order of a few nanometers.…”

Section: Introductionmentioning

confidence: 99%

Optical coherence tomography (OCT) with 2 nm axial resolution using a compact laser plasma soft X-ray source

Wachulak

Bartnik

Fiedorowicz

2018

Sci Rep

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We present optical coherence tomography (OCT) with 2 nm axial resolution using broadband soft X-ray radiation (SXR) from a compact laser plasma light source. The laser plasma was formed by the interaction of nanosecond laser pulses with a gaseous target in a double stream gas puff target approach. The source was optimized for efficient SXR emission from the krypton/helium gas puff target in the 2 to 5 nm spectral range, encompassing the entire “water-window” spectral range from 2.3 nm to 4.4 nm wavelength. The coherence parameters of the SXR radiation allowed for the OCT measurements of a bulk multilayer structure with 10 nm period and 40% bottom layer thickness to period ratio, with an axial resolution of about 2 nm and detect multilayer interfaces up to a depth of about 100 nm. The experimental data are in agreement with OCT simulations performed on ideal multilayer structure. In the paper, detailed information about the source, its optimization, the optical system, OCT measurements and the results are presented and discussed.

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Optical Coherence Tomography for NDE

Golde¹,

Kirsten²,

Schnabel³

et al. 2019

Handbook of Advanced Nondestructive Evaluation

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Optical coherence tomography with nanoscale axial resolution using a laser-driven high-harmonic source

Cited by 42 publications

References 28 publications

Coherence tomography with broad bandwidth extreme ultraviolet and soft X-ray radiation

Coherence tomography with broad bandwidth extreme ultraviolet and soft X-ray radiation

Optical coherence tomography (OCT) with 2 nm axial resolution using a compact laser plasma soft X-ray source

Optical Coherence Tomography for NDE

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