CMOS technology scaling opens up the possibility of designing variable capacitors based on a metal oxide semiconductor (MOS) structure with improved tuning range and quality factor. In this work, the high Q‐factor 24 and 21, wide tuning ratio 45% and 36% can be achieved by 65 nm low power technology n+/n‐well and p+/p‐well MOS varactor up to 10 GHz, respectively. Meanwhile, the equivalent circuit model, to model intrinsic and extrinsic parameters of MOS varactor, also have demonstrated that parasitic resistance is a main issue to dominate Q‐factors, and the measured flicker noise result of MOS varactor is directly dependant on gate leakage current. © 2009 Wiley Periodicals, Inc. Microwave Opt Technol Lett 51: 2119–2121, 2009; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.24567