A Wireless Passive Pressure Microsensor Fabricated in HTCC MEMS Technology for Harsh Environments

Tan, Qiulin; Hao, Kun; Xiong, Jijun; Q, Li; Zhang, Wendong; Li, Chen; Ding, Liqiong; Zhang, Xiansheng; Yang, Ming

doi:10.3390/s130809896

Cited by 41 publications

(39 citation statements)

References 25 publications

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“…However, they have been only demonstrated in very low temperatures. More recently, LC resonator, and inductive based coupling have been reported for high temperature applications . Nonetheless, these inductive coupling sensors are restricted in terms of coil orientation, size, and distance to metal surfaces.…”

Section: Introductionmentioning

confidence: 99%

Metamaterial Based Passive Wireless Temperature Sensor

et al. 2017

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This paper presents the fabrication, modeling, and testing of a metamaterial based passive wireless temperature sensor consisting of an array of closed ring resonators (CRRs) embedded in a dielectric material matrix. A mixture of 70 vol% Boron Nitride (BN) and 30 vol% Barium Titanate (BTO) is used as the dielectric matrix and copper washers are used as CRRs. Conventional powder compression is used for the sensor fabrication. The feasibility of wireless temperature sensing is demonstrated up to 200 C. The resonance frequency of the sensor decreases from 11.93 GHz at room temperature to 11.85 GHz at 200 C, providing a sensitivity of 0.462 MHz C. The repeatability of temperature sensing tests is carried out to quantify the repeatability. The highest standard deviation observed is 0.012 GHz at 200 C.

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Section: Introductionmentioning

confidence: 99%

Metamaterial Based Passive Wireless Temperature Sensor

et al. 2017

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“…Xiong et al and Tan et al have demonstrated improvements of the work reported in [22], both in LTCC and HTCC [24,25]. By applying a fugitive paste for support of the diaphragm during the fabrication, the yield was improved, and the resulting sensitivity of the LTCC sensor was 18163 ppm/bar at room temperature for pressures up to 3.6 bars.…”

Section: Introductionmentioning

confidence: 99%

Thermomechanical properties and performance of ceramic resonators for wireless pressure reading at high temperatures

Sturesson

Khaji

Knaust

et al. 2015

J. Micromech. Microeng.

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Thermomechanical properties and performance of ceramic resonators for wireless pressure reading in high temperatures. Micromechanics and Microengineering, 25(9) Abstract -This paper reports on the design, fabrication and thermomechanical study of ceramic LC resonators for wireless pressure reading, verified at room temperature, at 500 °C and at 1000 °C for pressures up to 2.5 bar. Five different devices were fabricated of high-temperature co-fired ceramics (HTCC) and characterized. Alumina green tape sheets were screen printed with platinum paste, micromachined, laminated and fired. The resulting samples were 21 x 19 mm 2 with different thicknesses. An embedded communicator part was integrated with either a passive backing part or with a pressure-sensing element, including an 80 µm thick and 6 mm diameter diaphragm. The study includes measuring thermally and mechanically induced resonance frequency shifts, and thermally induced deformations. For the pressure sensor device, contributions from changes in the relative permittivity and from expanding air, trapped in the cavity, were extracted. The devices exhibited thermomechanical robustness during heating, regardless of the thickness of the backing. The pressure sensitivity decreased with increasing temperature from 15 050 ppm/bar at room temperature to 2400 ppm/bar at 1000°C, due to the decreasing pressure difference between the external pressure and the air pressure inside the cavity. Journal of

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“…Passive pressure sensors based on resistive [4,5] or capacitive [6,7] sensing mechanisms were proposed to survive high temperatures above 400 o C. However, wire interconnection is required to interrogate these sensors, which is main failure mechanism for gas turbine applications [8]. By using capacitive sensing mechanism and inductive coupling, pressure sensors were demonstrated wirelessly for high-temperature applications [9][10][11]. However, quality (Q) factors of LC resonators are usually very limited, especially at high temperatures.…”

Section: Introductionmentioning

confidence: 99%