AACVD of Cu_2−xS, In₂S₃ and CuInS₂ thin films from [Cu(ⁱBu₂PS₂)(PPh₃)₂] and [In(ⁱBu₂PS₂)₃] as single source precursors

Abstract

PPh 3 ) 2 ] complexes have been synthesized and used as single source precursors to deposit thin films of cubic In 2 S 3 and Cu 2Àx S respectively on glass substrates by aerosolassisted chemical vapor deposition (AACVD) at 350-500 1C. Thin films of CuInS 2 have also been deposited by using 1 : 1 molar ratio of [In( i Bu 2 PS 2 ) 3 ] and [Cu( i Bu 2 PS 2 )(PPh 3 ) 2 ]. The deposited thin films were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM) and energy dispersive X-ray diffraction (EDX) techniques. Deposition of films at different temperatures showed significant variation in stoichiometry and microstructure. The CuInS 2 thin films were ultrasonicated in toluene along with dodecanthiol for 3 hours to obtain a suspension of CuInS 2 nanocrystallites with a diameter of ca. 18 AE 2 nm and a band gap of 1.59 eV.

Solution based CVD of main group materials

“…80 The compounds [R 2 M(SeP i Pr 2 ) 2 N] (M = Ga, R = Me; M = In, R = Me, Et) were synthesised from the reaction of MR 3 with NH(SeP i Pr 2 ) 2 . 82 The air and moisture stable indium compound [In(S 2 P i Bu 2 ) 3 ] deposited thin films of cubic In 2 S 3 on glass substrates by AACVD at 350-500 1C. Similarly, thin films of hexagonal g-In 2 Se 3 were deposited from the methyl indium derivative.…”

Superior visible-light assisted water splitting performance by Fe incorporated ZnO photoanodes

“…This is versatile method because of its fast coating rate, wider choice and availability of the precursors, controlled films morphology and easy way to deposit thin films in short time period. 30 Herein, we report the fabrication of pure ZnO and Fe incorporated ZnO photoanodes via aerosol assisted chemical vapour deposition method for high performance photoelectrochemical water splitting. The ZnO thin films incorporated with different Fe concentrations (2%, 5%, 10% and 15%) have shown improved light absorption with expanding absorption range to visible range.…”

Chemically vaporized cobalt incorporated wurtzite as photoanodes for efficient photoelectrochemical water splitting

“…Thus, AACVD offers smart way to prepare high quality, uniform thin films in short-time. 35,36 In present work, Pristine ZnO and Co incorporated ZnO thin films were deposited on FTO substrates via aerosol assisted chemical vapour deposition technique at 400°C. The asdeposited thin films have been characterised by using wide range of characterization techniques.…”