Room-temperature ferromagnetic Co-doped ZnO nanoneedle array prepared by pulsed laser deposition Appl. Phys. Lett. 87, 173119 (2005) We study planar defects in epitaxial Co:ZnO dilute magnetic semiconductor thin films deposited on c-plane sapphire (Al 2 O 3 ), as well as the Co:ZnO/Al 2 O 3 interface, using aberration-corrected transmission electron microscopy and electron energy-loss spectroscopy. Co:ZnO samples that were deposited using pulsed laser deposition and reactive magnetron sputtering are both found to contain extrinsic stacking faults, incoherent interface structures, and compositional variations within the first 3-4 Co:ZnO layers next to the Al 2 O 3 substrate. The stacking fault density is in the range of 10 17 cm À3 . We also measure the local lattice distortions around the stacking faults. It is shown that despite the relatively high density of planar defects, lattice distortions, and small compositional variation, the Co:ZnO films retain paramagnetic properties. V C 2013 AIP Publishing LLC.