AC thermal microscopy: a probe - sample thermal coupling model

Depasse, Françoise; Gomès, Séverine; Trannoy, N.; Grossel, Ph.

doi:10.1088/0022-3727/30/24/003

Cited by 16 publications

(21 citation statements)

References 19 publications

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“…Hence, the direct physical contact of the thermal probe and the polymer surface occurs at virtually the same temperature of both and, thus, should not produce significant thermal singularities at this point. Simulated thermal behavior is similar to the one concluded in ref from different prospectives and closely follows the experimental observations (Figure ).…”

Section: Resultssupporting

confidence: 86%

“…Detectable contrast can be produced and quantified in microthermal imaging of surfaces of polymers/organic materials with different chemical composition/microstructure, organic−inorganic nanocomposites, heterogeneous thin films on solid substrates, and metal−metal and metal−ceramic nanocomposites. Several developments, such as noncontact probing, modulated probing, modified probes, and data processing/modeling, such as incorporating surface mechanical response, unsteady conditions, and thermal diffusivity, could be implemented. ,, With these additional implementations, the sensitivity of this technique can be raised by at least 1 order of magnitude.…”

Section: Discussionmentioning

confidence: 99%

“…Local probing of surface thermal properties with a submicrometer resolution becomes a reality after the recent introduction of scanning thermal microscopy (SThM) as a new family of scanning probe microscopy (SPM) techniques. − Two major designs explore either microthermocouple or microthermoresistor as a miniature probe, which scans a surface in a usual SPM mode. − The SThM ability to probe surface thermal conductivity and diffusivity with a submicrometer resolution has been demonstrated for polymer composites as well as for semiconductor and metal surfaces. − Results on buried metal particles in polymer composites, , photothermal FTIR analysis, distributed thermal properties of metal alloys, thermal conductivity of diamond-like thin films, and localized phase transformation on polymer surfaces, have been recently published. This approach provides supplementary capabilities and new advantages in comparison with thermal stages and micromechanical analysis at different frequencies. − However, the quantitative characterization of the surface thermal properties is still a challenge for SThM.…”

Section: Introductionmentioning

confidence: 99%

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Probing Surface Microthermal Properties by Scanning Thermal Microscopy

et al. 1999

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Scanning thermal microscopy (SThM) was used for probing surface microthermal properties of a wide range of materials from polymers to metals. We demonstrated that SThM measurements in contact mode can provide unique capabilities of unambiguous measurements of localized thermal conductivity of a wide variety of surfaces with sensitivity better than 0.05 W m -1 K -1 and lateral resolution in the range from 0.03 µm for hard materials to 1 µm for compliant materials. Variation of surface microthermal conductivity correlates fairly well with known bulk values for hard materials. For compliant materials, significant contribution of local deformation to measured values of thermal response is noted.

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Section: Resultssupporting

confidence: 86%

Section: Discussionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Probing Surface Microthermal Properties by Scanning Thermal Microscopy

et al. 1999

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“…Thermal expansion of SPM tips induced by lateral laser heating has been reported in many works [11,13,35,51,52,65,66]. Thermal expansion from less than 0.01 nm [53], several nanometers [11,54], and to as long as 15 nm has been observed [68].…”

Section: Temperature Evolution and Distribution Inside The Tipmentioning

confidence: 93%

Near-field thermal transport in a nanotip under laser irradiation

Chen

Wang

2011

Nanotechnology

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We report on a systematic study of highly enhanced optical field and its induced thermal transport in nanotips under laser irradiation. The effects on electric field distribution caused by curvature radius, tip aspect ratio, and polarization angle of the incident laser are studied. Our Poynting vectors' study clearly shows that when a laser interacts with a metal tip, it is bent around the tip and concentrated under the apex, where extremely high field enhancement appears. This phenomenon is more like a liquid flow being forced/squeezed to go through a narrow channel. As the tip-substrate distance increases, the peak field enhancement decreases exponentially. A shift of field peak position away from the tip axis is observed. For the incident light, only its component along the tip axis direction has a contribution to the electric field enhancement under the tip apex. The optimum tip apex radius for field enhancement is about 9 nm when the half taper angle is 10°. For a tip with a fixed radius of 30 nm, field enhancement increases with the half taper angle when it is less than 25°. The thermal transport inside the nanoscale tungsten tips due to absorption of incident laser light is explored using the finite element method. A small fraction of light penetrates into the tip. As the polarization angle or apex radius increases, the peak apex temperature decreases. The peak apex temperature goes down as the half taper angle increases, even though the mean laser intensity inside the tip increases, revealing a very strong effect of the taper angle on thermal transport.

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“…Models for interaction between the scanning tip and sample are the subject of active research. However, much of the effort appears to be directed toward bolometer probes [2], [9], [17], [18].…”

Section: Structure and Operationmentioning

confidence: 99%

Surface micromachined polyimide scanning thermocouple probes

Gianchandani

2001

J. Microelectromech. Syst.

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Abstract-This paper describes micromachined scanning thermocouple probes that exploit the low thermal conductivity and the high mechanical flexibility of polyimide as a structural material. They are surface micromachined using a low-temperature six-mask process suitable for appending to a CMOS fabrication sequence. The probes are 200-1000-m long, 40-120-m wide, and of varying thickness. They are assembled by a flip-over approach that eliminates the need for dissolving the substrate wafer or removing the probe from it. Temperature sensing is provided by thin-film Ni/W or chromel/alumel thermopiles embedded in the polyimide, which provide Seebeck coefficients of 22.5 and 37.5 V/K per junction, respectively. Modeling results indicate that the low thermal conductivity of polyimide, causes the temperature drop along the probe length to be much higher than with other candidate materials such as Si or SiO 2 , which contributes to improved thermal isolation of the sample and higher temperature sensitivity of the probe. However, the response time of the probe is compromised, and the measured 3 dB bandwidth of the probes is 500 Hz. A sample scan is presented. [561]

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AC thermal microscopy: a probe - sample thermal coupling model

Cited by 16 publications

References 19 publications

Probing Surface Microthermal Properties by Scanning Thermal Microscopy

Probing Surface Microthermal Properties by Scanning Thermal Microscopy

Near-field thermal transport in a nanotip under laser irradiation

Surface micromachined polyimide scanning thermocouple probes

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