Acceleration-insensitive fully-decoupled tuning fork (FDTF) MEMS vibratory gyroscope with 1°/HR BIAS instability

Mechanism Balancing Taxonomy

“…For robotic applications, the reduction of exported forces also enables better repeatability as well as a simplified control command [31]. For sensing applications, such as in gyroscopic MEMS, force balanced designs are used to restrict the sensitivity of the device to angular velocities or accelerations [32][33][34]. Furthermore, wristwatch mechanical oscillators are typically force balanced in order to be insensitive to gravity effects as well as linear accelerations caused by chassis motion [7,21,35].…”

Silicon MEMS inertial sensors evolution over a quarter century

“…Though examples of MEMS gyroscopes with direct angle output (Type I, [116]) have been reported in the literature, the vast majority of successful silicon MEMS gyroscopes rely on the measurement of angular rates (Type II). This is achieved through the apparent Coriolis acceleration, induced when a suspended mass is kept in oscillation over a substrate, fixed to the rotating body [117][118][119]. A singleaxis yaw gyroscope (see figure 9) is thus modeled by a system of coupled equations describing the two lumped spring-mass damper systems [120]: (5) with the parameters having the same meaning as for equation (1), with subscripts x and y referring to the corresponding motion axis and α being the angular gain of the structure, a modal-mass-related coefficient that quantifies the Coriolisinduced coupling between the two modes.…”