Accuracy of nanoscale pitch standards fabricated by laser-focused atomic deposition

McClelland, Jabez J.; Anderson, William R.; Bradley, C. C.; Walkiewicz, M. R.; Celotta, Robert; Jurdik, E.; Deslattes, Richard D.

doi:10.6028/jres.108.0010

Cited by 48 publications

(28 citation statements)

References 20 publications

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“…Jabez. J. McClelland has even examined the average pitch of Cr nano-gratings by optical diffraction method, which turned out to be 212.7777±0.0069 nm, with a relative uncertainty of a few times 10 -5 [22]. Therefore, we corrected the calculated average pitch to 212.8 nm and got the evaluated standard deviation of pitch by a correction coefficient.…”

Section: B the Relationship Between Line Edge Roughness And Evaluatementioning

confidence: 99%

Optimization of Nano-Grating Pitch Evaluation Method Based on Line Edge Roughness Analysis

Chen

Liu

Wang

et al. 2017

Measurement Science Review

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Pitch uncertainty and line edge roughness are among the critical quality attributes of a pitch standard and normally the analyses of these two parameters are separate. The analysis of self-traceable Cr atom lithography nano-gratings shows a positive relevance and sensitivity between LER and evaluated standard deviation of pitch. Therefore, LER can be used as an aided pre-evaluation parameter for the pitch calculation method, such as the gravity center method or the zero-crossing points method. The optimization of the nano-grating evaluation method helps to obtain the accurate pitch value with fewer measurements and provide a comprehensive characterization of pitch standards.

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Section: B the Relationship Between Line Edge Roughness And Evaluatementioning

confidence: 99%

Optimization of Nano-Grating Pitch Evaluation Method Based on Line Edge Roughness Analysis

Chen

Liu

Wang

et al. 2017

Measurement Science Review

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“…One clear application is to use the periodic arrays of deposited lines as nanoscale pitch standards, since the periodicity can be traced to a very well determined optical frequency [14,15]. Periodic doping of materials by codeposition during growth also appears to hold a great deal of promise [16].…”

Section: Laser-focused Atomic Depositionmentioning

confidence: 99%

Nanotechnology with atom optics

McClelland

Hill

Pichler

et al. 2004

Science and Technology of Advanced Materials

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A brief review of atom optics is presented, with emphasis on how it can be applied in the field of nanotechnology. Two specific examples are discussed: laser-focused atomic deposition and deterministic production of single atoms. Results are summarized for these two techniques, and discussion is presented on how they can impact progress in the development of nanotechnology. Published by Elsevier Ltd.

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“…Artifacts made by this method can be traced directly to an atomic transition frequency. McClelland et al (2003), have made chromium lines as a highly accurate nanoscale length standard by laser-focused atomic deposition and demonstrated that pitch standards with absolute uncertainties of a few parts in10 -5 are possible with this technique (McClelland et al, 2003).…”

Section: Introductionmentioning

confidence: 99%

Nanoscale Pitch Standards Sample Fabricated using Laser-Focused Atomic Deposition

Zhao

et al. 2011

American Journal of Nanotechnology

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Problem statement: Nanotechnology is already a large sector of industry and science research and it is expected to continue to grow at very fast rate. The determination of absolute measurements of length at the nanometer scale and below is very difficult and expensive. So the nanoscale metrology standard is needed. Approach: The laser-focused atomic deposition is a new way to establish nanoscale pitch standards. When the atoms pass though laser standing wave field, the atoms will change the moving trajectory and be focused to the node (or antinode) of the laser standing wave according to the detuning of laser frequency and atomic resonant frequency. Because of the period of the laser standing wave, laser mask will form the anologue of an array of cylindrical lense. If a substrate is positioned at the focal plane of this lens array, a periodic structure is depositing onto the surface. The period of this structure is λ/2 of laser. Results: In this letter, a 425 nm laser light standing wave is used to focus a beam of chromium atoms to fabricate the nanoscale pitch standards sample of 213±0.1 nm. The height was 4 nm. The (FWHM) width of 64±6 nm. Conclusion/Recommendations: The period of this structure is λ/2 of laser, whose spatial period can be traced directly to an atomic transtition frequency and the uncertainty possibility is 10, which is fitted to be as the nanopitch standards.

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Accuracy of nanoscale pitch standards fabricated by laser-focused atomic deposition

Cited by 48 publications

References 20 publications

Optimization of Nano-Grating Pitch Evaluation Method Based on Line Edge Roughness Analysis

Optimization of Nano-Grating Pitch Evaluation Method Based on Line Edge Roughness Analysis

Nanotechnology with atom optics

Nanoscale Pitch Standards Sample Fabricated using Laser-Focused Atomic Deposition

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