Accurate high-resolution depth profiling of magnetron sputtered transition metal alloy films containing light species: A multi-method approach

Abstract

We present an assessment of a multi-method approach based on ion beam analysis to obtain highresolution depth profiles of the total chemical composition of complex alloy systems. As a model system we employ an alloy based on several transition metals and containing light species. Samples have been investigated by a number of different ion-beam based techniques, i.e., Rutherford Backscattering Spectrometry, Particle-Induced X-ray Emission, Elastic Backscattering Spectrometry and Time-of-Flight/Energy Elastic Recoil Detection Analysis. Sets of spectra obtained from these different techniques were analyzed both independently and following an iterative and self-consistent approach yielding a more accurate depth profile of the sample, including both metallic heavy constituents (Cr, Fe and Ni) as well as the rather reactive light species (C, O) in the alloy. A quantitative comparison in terms of achievable precision and accuracy is made and the limitations of the single method approach are discussed for the different techniques. The multi-method approach is shown to yield significantly improved and accurate information on stoichiometry, depth distribution, and thickness of the alloy with the improvements being decisive for a detailed correlation of composition to the material properties such as corrosion strength. The study also shows the increased relative importance of experimental statistics for the achievable accuracy in the multi-method approach.

Antimony‐Doped Tin Oxide as Transparent Back Contact in Cu2ZnSnS4 Thin‐Film Solar Cells

“…This composition is similar to the target composition of 66.5/32.3/1.2 at%, except for the increase in the Sb content, which is not fully understood. In Figure , the RBS and PIXE spectra (a black solid‐dotted line and black solid line, respectively) of the ATO sample measured simultaneously and analyzed self‐consistently are shown (the red solid line represents the final fit obtained with SIMNRA software) . However, the achieved minimum resistivity ( ρ ) of 3.6 mΩ·cm is within the range typically reported in the literature (≈1–7 mΩ·cm) for sputtered ATO …”

Influence of structure and cation distribution on magnetic anisotropy and damping in Zn/Al doped nickel ferrites

“…To disentangle the element-specific contributions, the spectra were analyzed using the SIMNRA software [13]. Details of the experimental setup are described elsewhere [14]. The static magnetic properties were measured with an integral superconducting quantum interference device (SQUID) magnetometry by a Quantum Design MPMS-XL5 system applying the magnetic field in the film plane (IP) as well as out-of-plane (OOP).…”

Photochromic Mechanism and Dual‐Phase Formation in Oxygen‐Containing Rare‐Earth Hydride Thin Films

“…In order to enhance the accuracy of the analysis, the set of spectra was evaluated following an iterative self‐consistent approach. [ 10,11 ] Elastic backscattering spectrometry shows a rather homogeneous gadolinium concentration throughout the film. The depth profile from nuclear reaction analysis reveals that hydrogen is depleted to ≈16 at% in the near‐surface region and is found otherwise between ≈36 and ≈44 at% (statistic uncertainty of ≈3 at%).…”