The latest development of Silicon-Germanium (SiGe) HBTs has clearly demonstrated that the standard driftdiffusion model is not capable to predict the device performance. Thus more advanced simulation approaches are necessary such as simulators with hydrodynamic (HD) transport models. However, for realistic predictions, suitably calibrated models are required. In this paper, new accurate analytical models for the electron energy relaxation time and electron mobility are introduced that are suitable for implementation in HD TCAD simulators. These models are calibrated to simulation results obtained by the Boltzmann transport equation (BTE). Also a comparison with experimental data of an advanced SiGe HBT is given.
I. INTRODUCTIONWith shrinking device dimensions and increasing operating frequencies, conventional simulation techniques such as the drift-diffusion (DD) model have started to loose their validity for predicting the electrical behavior of modern HBTs. For an improved description of carrier transport and the device performance, simulators solving the Boltzmann transport equation (BTE) or hydrodynamic (HD) models have been used. Concerning the accuracy, BTE solvers provide more physical insight into carrier transport because they offer a detailed description of band structure effects and scattering. The standard technique for solving the BTE is the MonteCarlo (MC) method, which is attractive due to the relatively small implementation effort. However, the major drawbacks of the MC method are the large simulation times and the noisy results especially for minority carriers.As a compromise HD models have been widely-used, which are derived by moment expansions and simplifications of the BTE. These models are very attractive concerning the simulation time but their accuracy w.r.t. the solution of the BTE strongly depends on the chosen HD formulation and material models, e.g. carrier mobilities. In order to retain the advantages of the HD approach, accurately calibrated HD models are inevitable.In section II of this paper the HD model will be shortly reviewed. In section III an adjustment strategy w.r.t. BTE results is introduced. In addition, a new electron energy relaxation time model and extensions of the Caughey-Thomas [1] mobility model for electrons is given. Section IV contains a comparison of HD simulation results with experimental data.