2019
DOI: 10.1364/oe.27.011721
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Accurate surface profilometry using differential optical sectioning microscopy with structured illumination

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Cited by 17 publications
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“…This approach necessitates transverse point-by-point scanning for 2D imaging and axial layer-by-layer scanning for 3D measurements [8]. The surface topography of the tested sample is determined through the peak localization algorithm applied to the confocal axial light intensity response curve.…”
Section: Introductionmentioning
confidence: 99%
“…This approach necessitates transverse point-by-point scanning for 2D imaging and axial layer-by-layer scanning for 3D measurements [8]. The surface topography of the tested sample is determined through the peak localization algorithm applied to the confocal axial light intensity response curve.…”
Section: Introductionmentioning
confidence: 99%