2014
DOI: 10.1016/j.vacuum.2014.01.026
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Acetylene plasma polymer treated by atmospheric dielectric barrier discharge

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Cited by 6 publications
(2 citation statements)
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“…Acetylene is one of the monomers that can be easily deposited from the gas or plasma phase to form C:H coatings, and there is a lot of experimental data on plasma-polymerized acetylene (PPA), regarding the empirical conditions that influence the polymerization process as well as the investigation of the electrical, optical, mechanical, and biomedical properties of the PPA films. Several parameters can be controlled during the plasma polymerization that affect the structural, physical, and chemical properties of the plasma polymer film for a given monomer: the monomer flow rate, discharge power, monomer pressure, and substrate temperature. Although the common deposition method of a-C:H films is vacuum plasma discharge, atmospheric pressure deposition has its own benefits. Both hard and soft films can be grown in dielectric barrier discharge using acetylene, and this kind of discharge can produce a flux of thermalized radicals greatly exceeding the ion flux due to the high collision rate in the atmospheric pressure (see ref and references within).…”
Section: Introductionmentioning
confidence: 99%
“…Acetylene is one of the monomers that can be easily deposited from the gas or plasma phase to form C:H coatings, and there is a lot of experimental data on plasma-polymerized acetylene (PPA), regarding the empirical conditions that influence the polymerization process as well as the investigation of the electrical, optical, mechanical, and biomedical properties of the PPA films. Several parameters can be controlled during the plasma polymerization that affect the structural, physical, and chemical properties of the plasma polymer film for a given monomer: the monomer flow rate, discharge power, monomer pressure, and substrate temperature. Although the common deposition method of a-C:H films is vacuum plasma discharge, atmospheric pressure deposition has its own benefits. Both hard and soft films can be grown in dielectric barrier discharge using acetylene, and this kind of discharge can produce a flux of thermalized radicals greatly exceeding the ion flux due to the high collision rate in the atmospheric pressure (see ref and references within).…”
Section: Introductionmentioning
confidence: 99%
“…Wemlinger et al [22] polymerized acetylene in atmospheric pressure plasma chamber with deposition rate of 23 nm/s. Capote et al [23] reported that the variation of argon concentration Ar/(Ar + C 2 H 2 ) in a low pressure chamber changed the physical properties of films (deposition rate, roughness, adhesion, compressive stress and wear), showing that it was possible to grow acetylene films with desired characteristics for mechanical and tribological applications.…”
Section: Introductionmentioning
confidence: 99%