Deposition of thin films using argon/acetylene atmospheric pressure plasma jet

Abstract

Atmospheric pressure plasma jet was used to deposit polymer films from argon/air/acetylene mixture. Depending on the gas composition, three modes of operation were observed and characterized. The film deposited by a stationary jet had a circular shape with area (where thickness was almost constant) about the nozzle inner diameter. The deposition rate of stationary jet decreased with the time: a film of 2 μm was obtained after the first two minutes, while in the next two minutes only 1.3 μm film was deposited. The plasma polymers were characterized by infrared spectroscopy, where variety of C\ \H and few C\ \O bonds were detected. By using a linear displacement system, we obtained homogeneous deposition over a larger area with deposition rate of about 330 nm/ min, showing the potential of such plasma jet system for large-scale depositions.

A Review of Plasma Synthesis Methods for Polymer Films and Nanoparticles under Atmospheric Pressure Conditions

“…Materials in a gaseous state at room temperature are themselves applied as precursors, whereas materials that exist as liquids are mainly introduced to a plasma region as an aerosol via atomizing or bubbling with gas. GATP methods are commonly used for the deposition of polymer films [ 51 , 52 , 53 , 54 , 55 , 56 , 57 , 58 , 59 , 60 , 61 , 62 , 63 , 64 , 65 , 66 , 67 , 68 , 69 , 70 , 71 , 72 , 73 , 74 , 75 , 76 , 77 , 78 , 79 , 80 , 81 , 82 , 83 , 84 , 85 ], as this method allows in-line processing by moving either the APP devices or the substrates [ 39 ].…”

“…Zhang et al [ 51 ], Ricci Castro et al [ 52 ], Van Vrekhem et al [ 53 ], and Pandiyaraj et al [ 54 ] reported an APPJ with pin–ring electrodes. The pin electrode and the ring electrode are used as high-voltage (HV) and ground electrodes, respectively.…”

“…In the paper by Ricci Castro et al, Ar was supplied for discharging, and an air/acetylene mixture gas was supplied as a precursor. The power source was at 19 kHz frequency and 17 kVp–p (peak-to-peak) voltage, consisting of two sinusoidal waves with disparate amplitudes to avoid overheating issues [ 52 ]. In the paper by Van Vrekhem et al, Ar gas was also used as the discharge gas, while aerosol MMA was bubbled by the Ar gas and input into the plasma afterglow region; this utilized power generation from a 23-kHz AC HV source to activate the APP [ 53 ].…”

“…Kodaira et al [ 56 ], Hossain et al [ 57 ], and Malinowski et al [ 58 ] proposed an APPJ with only pin-type electrodes for generating the APP, as shown in Figure 3 . Kodaira et al investigated the characterization of APP-polymerized hexamethyldisilazane (HMDSN); they used the same device as the studies from Ricci Castro et al [ 52 ], but without a grounded ring electrode ( Figure 3 a). The power was also the same waveform, with 12 kVp–p.…”

State-of-the-Art, and Perspectives of, Silver/Plasma Polymer Antibacterial Nanocomposites

“…These systems are based on PE-CVD process, but the gaseous or liquid precursors are introduced to the plasma ignited at atmospheric pressure. Different configurations of atmospheric pressure plasma jets were demonstrated to be suitable for the deposition of various plasma polymer films (e.g., [ 110 , 111 , 112 , 113 , 114 , 115 , 116 , 117 , 118 ]).…”