Acoustic HBAR spectroscopy of metal (W, Ti, Mo, Al) thin films

Mansfeld, G.D.; Alekseev, S. G.; Kotelyansky, I.M.

doi:10.1109/ultsym.2001.991652

Cited by 22 publications

(13 citation statements)

References 1 publication

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“…for all the layers and diamond substrate were taken from Refs. [16,21,30]. Such PLS parameters and acoustic processes as distribution of elastic displacement fields within all the parts of PLS (cross-sections of substrate and TFPT), AFR modeling, calculation of the wavelengths and phase velocities of acoustic modes of different types, identification of its types, etc.…”

Section: D Fem Simulation Results Of Acoustic Wave Propagation In Dimentioning

confidence: 99%

Piezoelectric-Layered Structures Based on Synthetic Diamond

Sorokin¹,

Квашнин²,

Telichko³

et al. 2016

Piezoelectric Materials

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Resuρts oλ theoreticaρ, modeρinμ, and exυerimentaρ investiμation oλ microwave acoustic υroυerties oλ υiezoeρectric ρayered structure Me /"ρN/Me / diamond have been υresented within a wide λreφuency band . -GHz. The hiμhest amonμ πnown materiaρ φuaρity υarameter Q × f ~ Hz λor the IIa tyυe synthetic diamond at oυerationaρ λreφuency ~ GHz has been λound. Conditions oλ UHF excitation and υroυaμation oλ the buρπ, surλace, and Lamb υρate acoustic waves have been estabρish-ed and studied exυerimentaρρy. Freφuency deυendencies oλ the imυedance and φuaρity λactor have been studied to obtain a number oλ υiezoeρectric ρayered structure υarameters as eρectromechanicaρ couυρinμ coeλλicient, eφuivaρent circuit υarameters, etc. Resuρts oλ Γ λinite eρement modeρinμ oλ a μiven υiezoeρectric ρayered structure have been comυared with the exυerimentaρ ones obtained λor the reaρ hiμh-overtone buρπ acoustic resonator. "n oriμin oλ hiμh-overtone buρπ acoustic resonator's sυurious resonant υeaπs has been studied. Resuρts on UHF acoustic attenuation oλ IIa-tyυe synthetic sinμρe crystaρρine diamond have been υresented and discussed in terms oλ "πhiezer and Landau-Rumer mechanisms oλ υhonon-υhonon interaction. Identiλica-tion and cρassiλication oλ Lamb waves beρonμinμ to severaρ branches as weρρ as disυersive curves oλ υhase veρocities have been executed. Necessity oλ introducinμ a more correct Lamb-mode cρassiλication has been recoμnized.

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Section: D Fem Simulation Results Of Acoustic Wave Propagation In Dimentioning

confidence: 99%

Piezoelectric-Layered Structures Based on Synthetic Diamond

Sorokin¹,

Квашнин²,

Telichko³

et al. 2016

Piezoelectric Materials

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“…Зависимость упругих постоянных AlScN от концентрации скандия. Закрашенными символами черного и серого цвета обозначены данные, полученные в результате квантово-химического расчета и экспериментальных измерений соответственно; пустыми символами, символами с горизонтальной, вертикальной и косой штриховкой обозначены данные работ [12,29,13,36] соответственно Fig. 3.…”

Section: методы исследованияunclassified

Dependence of Physical Properties of Piezoelectric Aluminum-Scandium Nitride on Scandium Concentration

Zhukov¹,

Shcherbakov²,

Сорокин³

et al. 2021

IVKKT

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In this work the physical properties of the piezoelectric aluminum-scandium nitride (ASN) solid solution as a function of scandium concentration were studied using the density functional theory and experimental methods. The phase transition from the wurtzite phase to the rock salt phase at a Sc concentration of 43% was shown. The barriers of transformation from the wurtzite phase to the rock salt phase for various Sc concentrations were obtained. The behavior of the ASN piezoelectric constant d33 calculated by the piezoelectric constants e33, e31, and e15 shows a sharp increase with increasing Sc concentration compared to aluminum nitride AlN. The relationship between the increase in the piezoelectric response of ASN and the softening of the lattice, accompanied by a decrease in the main elastic constants C11, C33, C44 and C66, as well as a decrease in the c/a ratio with increasing Sc concentration, is shown. ASN films with a predominance of the crystal orientation (00·2) were obtained experimentally by magnetron sputtering. The structural properties of the films were studied by X-ray diffraction analysis. A comparison of the experimentally obtained dependence of the c/a ratio on the Sc concentration with the theoretical values showed a good correspondence. Studies of the physical properties of ASN thin films were performed using microwave multi-overtone composite resonators on diamond substrates with a longitudinal bulk acoustic wave (BAW) as the operating mode in the range of 0.5 – 20 GHz. The frequency dependences of the Q-factor of BAW-resonators with different ASN films were obtained, and the frequency dependences of the square of the modulus of the form factor as |m|2 were calculated. The dependences of the elastic constant С33 and the piezoelectric constant e33 for the ASN films with different Sc concentrations were calculated. The calculated and measured values of these constants are agreed within the experimental error.

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“…The data on material constants and acoustical properties for Al, AlN, Mo, and diamond were taken from [10][11][12]. It was supposed that the acoustic attenuation for Al, AlN, and Mo obeyed to the Akhieser's law: α ~ f 2 at all the frequencies, but, starting from ~ 1 GHz the acoustic attenuation for single crystalline diamond should be changed as α ~ f. The last is defined by the transition to Landau-Rumer regime as was shown in our paper [13].…”

Section: Experiments and Computer Simulationmentioning

confidence: 99%

Resonant transformation of acoustic waves observed for the diamond based HBAR

Gennagy

Boris

Arseniy

2015

2015 Joint Conference of the IEEE International Frequency Control Symposium &Amp; The European Frequency and Time Forum

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The resonant transformation of acoustic waves in "Al/AlN/Mo/(100) diamond" piezoelectric structure has been studied by means of 2D FEM simulation. The nature of arising acoustical modes has been defined by the detail investigation of fields of elastic displacements. It was shown that the appearance of strongest spurious resonant peaks at frequencies above the bulk acoustic overtones is concerned with Lamb-like modes within diamond substrate, excited on the critical frequencies. In these points Lamb mode transforms into standing plate wave. Experimental and calculated data are in good accordance.

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Acoustic HBAR spectroscopy of metal (W, Ti, Mo, Al) thin films

Cited by 22 publications

References 1 publication

Piezoelectric-Layered Structures Based on Synthetic Diamond

Piezoelectric-Layered Structures Based on Synthetic Diamond

Dependence of Physical Properties of Piezoelectric Aluminum-Scandium Nitride on Scandium Concentration

Resonant transformation of acoustic waves observed for the diamond based HBAR

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