Solid State Gas Sensing 2008
DOI: 10.1007/978-0-387-09665-0_8
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Acoustic Wave Gas and Vapor Sensors

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Cited by 8 publications
(9 citation statements)
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“…Acoustic wave sensors exploit the frequency change of acoustic waves (mechanical vibrations) from interactions between CO and CO sensing piezoelectric materials to detect CO [ 149 ]. Based on propagation characteristics of the acoustic waves through the piezoelectric materials, acoustic wave sensors are categorized as bulk acoustic wave (BAW) sensors and surface acoustic wave (SAW) sensors [ 149 ].…”
Section: Dissolved Co Measurement Methodsmentioning
confidence: 99%
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“…Acoustic wave sensors exploit the frequency change of acoustic waves (mechanical vibrations) from interactions between CO and CO sensing piezoelectric materials to detect CO [ 149 ]. Based on propagation characteristics of the acoustic waves through the piezoelectric materials, acoustic wave sensors are categorized as bulk acoustic wave (BAW) sensors and surface acoustic wave (SAW) sensors [ 149 ].…”
Section: Dissolved Co Measurement Methodsmentioning
confidence: 99%
“…Quartz crystal microbalances (QCMs) are the most commonly used BAW sensors [ 149 ]. A CO sensing layer is coated on piezoelectric materials to generate tiny mass change through CO oxidation [ 150 , 151 ] or CO absorption [ 152 ], which alters the vibrational frequency of the piezoelectric materials in succession.…”
Section: Dissolved Co Measurement Methodsmentioning
confidence: 99%
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“…The sensitivity and selectivity of a BAW can be tuned by chemical surface coating. The gravimetric-based measurement leads to a sensing signal, which carries information about the adsorption of analytes [ 24 ]. In recent years, rapid progress has been made in the field of gas sensing using thin film bulk acoustic resonators (FBARs) [ 25 , 26 , 27 , 28 , 29 ].…”
Section: Introductionmentioning
confidence: 99%
“…One class of sensors with the potential to be a candidate for such multi-parameter determinations is the acoustic wave resonators 22 23 . Based on gravimetric detections, the sensor output is directly linear to the amount of adsorbed gas molecule and real-time sorption process can be recorded as well.…”
mentioning
confidence: 99%