Acoustofluidic Scanning Nanoscope with High Resolution and Large Field of View

Jin, Geonsoo; Bachman, Hunter; Naquin, Ty Downing; Rufo, Joseph; Hou, Serena; Tian, Zhenhua; Zhao, Chenglong; Huang, Tony Jun

doi:10.1021/acsnano.0c03009

Cited by 21 publications

(22 citation statements)

References 77 publications

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“…Microlens‐based imaging can observe subcellular structures and adenoviruses, [ 28 , 29 , 30 ] as well as perform super‐resolution imaging on nonbiological samples such as semiconductor wafer patterns [ 31 , 32 , 33 , 34 , 35 ] and nanostructures. [ 36 , 37 , 38 ] When a single microlens is used for imaging, the imaging field of view (FOV) is limited by the size of the microsphere. To address this issue, microsphere scanning imaging can be achieved through the use of chemical driving, [ 39 ] acoustic fluids, [ 36 ] and optical tweezers.…”

Section: Introductionmentioning

confidence: 99%

“…[ 36 , 37 , 38 ] When a single microlens is used for imaging, the imaging field of view (FOV) is limited by the size of the microsphere. To address this issue, microsphere scanning imaging can be achieved through the use of chemical driving, [ 39 ] acoustic fluids, [ 36 ] and optical tweezers. [ 40 , 41 , 42 ] In addition, a 3D translation stage can be used to precisely control the microsphere integrated within a conventional microscope objective lens, [ 43 , 44 ] a capillary glass tube, [ 45 , 46 ] a tungsten probe, [ 47 ] and an AFM probe.…”

Section: Introductionmentioning

confidence: 99%

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Correlative AFM and Scanning Microlens Microscopy for Time‐Efficient Multiscale Imaging

Zhang

Shi

et al. 2022

Advanced Science

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With the rapid evolution of microelectronics and nanofabrication technologies, the feature sizes of large‐scale integrated circuits continue to move toward the nanoscale. There is a strong need to improve the quality and efficiency of integrated circuit inspection, but it remains a great challenge to provide both rapid imaging and circuit node‐level high‐resolution images simultaneously using a conventional microscope. This paper proposes a nondestructive, high‐throughput, multiscale correlation imaging method that combines atomic force microscopy (AFM) with microlens‐based scanning optical microscopy. In this method, a microlens is coupled to the end of the AFM cantilever and the sample‐facing side of the microlens contains a focused ion beam deposited tip which serves as the AFM scanning probe. The introduction of a microlens improves the imaging resolution of the AFM optical system, providing a 3–4× increase in optical imaging magnification while the scanning imaging throughput is improved ≈8×. The proposed method bridges the resolution gap between traditional optical imaging and AFM, achieves cross‐scale rapid imaging with micrometer to nanometer resolution, and improves the efficiency of AFM‐based large‐scale imaging and detection. Simultaneously, nanoscale‐level correlation between the acquired optical image and structure information is enabled by the method, providing a powerful tool for semiconductor device inspection.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Correlative AFM and Scanning Microlens Microscopy for Time‐Efficient Multiscale Imaging

Zhang

Shi

et al. 2022

Advanced Science

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“…The magnification and lateral resolution can be further improved by immersing As 2 S 3 microspheres in media with a lower refractive index (e.g., polydimethylsiloxane). In addition to conventional microscopes, As 2 S 3 microspheres can also be used in combination with other microscopic platforms (e.g., scanning laser confocal microscope, [37] acoustofluidic scanning microscope, [38] and white-light interferometry [39] ) to significantly improve their lateral [37,38] or axial [39] imaging performance. They can further be integrated with a mechanical scanning system (e.g., atomic force microscopy cantilever [36,40] ) or optically trapped [41] to precisely control the imaging position in liquid environments and greatly expand the FOV for super-resolution imaging of largearea specimens.…”

Section: Discussionmentioning

confidence: 99%

Chalcogenide Microsphere‐Assisted Optical Super‐Resolution Imaging

Xie

Cai

Pan

et al. 2022

Advanced Optical Materials

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Microsphere‐assisted optical imaging has been proved straightforward and cost‐effective for super‐resolution imaging in material science and biomedical research. Optically transparent microspheres with a high refractive index are critical for achieving superior super‐resolution capabilities yet remain to be further exploited. Here, the use of As2S3 (an optically transparent chalcogenide glass) microspheres, with a refractive index as high as 2.31 (at 600 nm) and diameters ranging from 10 to 215 µm, for optical super‐resolution imaging is reported. Under white‐light illumination (peaked at 646 nm), As2S3 microspheres full‐immersed in polymethyl methacrylate or immersion oil generate super‐resolved virtual images of nanostructures (≈90 nm in minimum feature size) with a magnification up to 8×. The lateral resolution of full‐immersed microspheres, which can be as low as ≈172 nm for a 19 µm diameter As2S3 microsphere, is also investigated. Moreover, super‐resolved real imaging of nanostructures with semi‐immersed As2S3 microspheres is demonstrated for the first time. Compared with the full‐immersion approach (e.g., for a 30 µm diameter microsphere, the image plane is ≈30 µm underneath the specimen with a magnification of 4.3×), the semi‐immersion approach provides an obvious improvement in the magnification (6.6×) and a much longer operation distance to the objective (the image plane is ≈140 µm above the specimen).

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“…In recent years, microlens arrays (MLAs) have attracted extensive attention due to their wide applications in various fields such as digital displays, [ 1–3 ] light‐emitting‐diodes (LEDs), [ 4,5,6,7 ] super‐resolution imaging, [ 8,9,10 ] and artificial compound eyes. [ 11,12,13 ] The demand of MLAs with precise shaping features has increased over the last few decades.…”

Section: Introductionmentioning

confidence: 99%

“…In recent years, microlens arrays (MLAs) have attracted extensive attention due to their wide applications in various fields such as digital displays, [1][2][3] light-emitting-diodes (LEDs), [4,5,6,7] super-resolution imaging, [8,9,10] and artificial compound used to fabricate micro/nanolens arrays (M/NLAs). [13,28] Zhou et al reported that the diameters of the MLAs fabricated by E-jet printing decreased from 32.45 to 1.59 µm when the inner diameter of the nozzle decreased from 25 to 1 µm.…”

Section: Introductionmentioning

confidence: 99%

Direct Microtip Focused Electrohydrodynamic Jet Printing of Tailored Microlens Arrays on PDMS Nanofilm‐Modified Substrate

Liang

et al. 2021

Adv Materials Technologies

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Microlens arrays (MLAs) have been widely employed as key components of various functional devices. However, the high‐efficiency fabrication of tailored MLAs with high numerical aperture (NA) is still a challenge. Herein, a one‐step maskless fabrication method of MLAs on polydimethylsiloxane (PDMS) nanofilm modified substrate via microtip focused electrohydrodynamic jet (MFEJ) printing is developed. The MFEJ printing can effectively avoid nozzle blockage even with highly viscous UV‐curable polymer. The contact angle (CA) of polymer can be controlled on different hydrophobic substrates, which are modified by treatment with PDMS, and MLAs with different NA can be realized. The polymer CA increases from 19° to 73° after surface modification, and the NA of MLAs correspondingly increases from 0.18 to 0.53. The MLAs diameter and focusing properties can be easily tuned by combining the printing parameters with PDMS nanofilm modification. Various patterns of MLAs with high NA are obtained by MFEJ printing. The projection experiment indicates the uniformity and excellent optical performance of the MLAs. Moreover, the fabricated MLAs can generate magnified virtual images with a magnification up to 1.72‐fold. Results show that the MFEJ printing can fabricate functional and tailored MLAs with high NA on the PDMS nanofilm‐modified substrate.

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Acoustofluidic Scanning Nanoscope with High Resolution and Large Field of View

Cited by 21 publications

References 77 publications

Correlative AFM and Scanning Microlens Microscopy for Time‐Efficient Multiscale Imaging

Correlative AFM and Scanning Microlens Microscopy for Time‐Efficient Multiscale Imaging

Chalcogenide Microsphere‐Assisted Optical Super‐Resolution Imaging

Direct Microtip Focused Electrohydrodynamic Jet Printing of Tailored Microlens Arrays on PDMS Nanofilm‐Modified Substrate

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