2022
DOI: 10.1002/jemt.24229
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Acquisition and evaluation procedure to improve the accuracy ofSAED

Abstract: The achievement of this work is that fine tuning of experimental and evaluation parameters can improve the absolute accuracy and reproducibility of selected area electron diffraction (SAED) to 0.1% without using internal standard. Due to the proposed procedure it was possible to reach a reproducibility better than 0.03% for camera length between sessions by careful control of specimen height and illumination conditions by monitoring lens currents. We applied a calibration specimen composed of nanocrystalline g… Show more

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Cited by 8 publications
(6 citation statements)
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“…During the analysis, our approach was to reduce the number of refined parameters as much as possible. By applying standard acquisition conditions, the variation in camera length was below 0.1% [ 3 ], so the correction for detector distance/camera length could be skipped. Data pre-processing before obtaining the integrated intensity profile allowed the diffraction pattern center to be found and corrected ellipticity with high accuracy [ 20 ]; thus, no further refinement of the center displacement or tilt error was needed.…”
Section: Discussionmentioning
confidence: 99%
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“…During the analysis, our approach was to reduce the number of refined parameters as much as possible. By applying standard acquisition conditions, the variation in camera length was below 0.1% [ 3 ], so the correction for detector distance/camera length could be skipped. Data pre-processing before obtaining the integrated intensity profile allowed the diffraction pattern center to be found and corrected ellipticity with high accuracy [ 20 ]; thus, no further refinement of the center displacement or tilt error was needed.…”
Section: Discussionmentioning
confidence: 99%
“…The correct alignment of the TEM ensures not only calibration accuracy and the reproducibility of camera length but also the minimization and steadiness of instrumental peak broadening. We expect that the combination of the standard acquisition procedure [ 3 ] with the in-TEM determination of instrumental broadening will promote a more reliable and sophisticated analysis of nanostructure parameters of complex nanomaterials, like the preferred orientation of multicomponent thin films or anisotropic crystallite size in biological nanomaterials.…”
Section: Discussionmentioning
confidence: 99%
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