Active aberration- and point-spread-function control in direct laser writing

Waller, Erik H.; Renner, Michael; Freymann, Georg von

doi:10.1364/oe.20.024949

Cited by 46 publications

(42 citation statements)

References 21 publications

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“…[ 56,57 ] Despite the sequential update of the digital hologram displayed on the SLM, smooth structuring was demonstrated (Figure 2 h). [ 34,[59][60][61][62] [ 58 ] Aberrations may severely degrade the energy confi nement in the focus leading to a strong reduction of structural quality.…”

Section: Slm-based Laser Lithographymentioning

confidence: 99%

“…[ 67 ] However, due to the lower confi nement along one axis, proximity effects are increased. [ 62 ] In the same publication it was shown that the reduced aspect ratio leads to a larger fabrication window of these photonic structures and in consequence to improved structural quality. The reduction of the aspect ratio may also be achieved by shaded-ring fi lters.…”

Section: Progress Reportmentioning

confidence: 99%

See 1 more Smart Citation

Three‐Dimensional μ‐Printing: An Enabling Technology

Hohmann

Renner

Waller

et al. 2015

Advanced Optical Materials

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155

103

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functional elements, chiral photonic crystals, photonic metamaterials and quasicrystals. With this technology becoming commercially available, [ 1 ] many novel ideas have been realized by scientists around the world. Some of these developments can already be seen as new research areas enabled by 3D µ-printing.Many excellent reviews of the underlying technology have recently been published, and we give here just a short selection. [2][3][4][5] With the present progress report we want to summarize the tremendous technological development during the last fi ve years as well as to give an overview over some vastly growing research fi elds enabled by this development. As the number of research papers based on 3D µ-printing as enabling technology is exploding, we intend to categorize the most recent developments to identify future research directions and possible novel fi elds for the years to come. Recent Technological Advances in 3D µ-PrintingFrom the fi rst proof-of-principle in 1997, [ 6 ] the µ-printing community has continuously been expanding the structuring capabilities of µ-printing systems overcoming limitations such as structuring speed, sample volume, complicated pre and post processing, as well as minimum feature size and resolution. Progress is made along two directions: First, extending the aforementioned benchmarks of µ-printing systems. Second, techniques that move µ-printed structures towards functional devices. These two directions obviously are intertwined and require interdisciplinary research efforts on new photocurable materials, complex light-matter interaction, reaction kinetics as well as processes on a molecular level infl uencing structure formation. The most infl uential technological advances are summarized in this section.Section 2.1. covers recent work leading to a tremendous increase of the capabilities of µ-printing systems. Section 2.2. describes superresolution concepts exploiting light-matter interactions to achieve smaller feature sizes and higher structural resolution. Section 2.3. reviews spatial light modulator (SLM) based laser lithography providing additional degrees of freedom by shaping the wavefront of the laser beam. Laser Sources, Scanning Devices, and Writing GeometryThe high complexity of ultrafast fs-lasers drives the community to look for alternative laser sources, leading to cost and In this progress report the development of three-dimensional µ-printing and its impact as an enabling technology onto different scientifi c fi elds is reviewed. Driven by direct laser writing via two-photon absorption, the technology has reached a level of maturity and ease of application such that 3D printing on the micrometer scale can now be considered. While the underlying technology is still developing towards higher resolution and increasing speed of fabrication, the last fi ve years have seen new fi elds rising that were obviously enabled by 3D µ-printing. Among the recent technological developments discussed in this progress report are the fi elds of super-resolution lithography ...

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Section: Slm-based Laser Lithographymentioning

confidence: 99%

Section: Progress Reportmentioning

confidence: 99%

Three‐Dimensional μ‐Printing: An Enabling Technology

Hohmann

Renner

Waller

et al. 2015

Advanced Optical Materials

Self Cite

155

103

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show abstract

“…This eliminated interference with unmodulated light from the SLM allowing effective control of the intensity and phase distribution of light in the pupil plane of the objective lens [19]. In this configuration, the SLM could be used for adaptive aberration correction and beam shaping [20,21], greatly improving the quality of the fabrication focus.…”

Section: Introductionmentioning

confidence: 99%

Waveguide fabrication in KDP crystals with femtosecond laser pulses

et al. 2014

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Optical waveguides fabricated in potassium dihydrogen phosphate (KDP) by ultrafast laser pulses are demonstrated. Dependent on the incident pulse energy, two different types of refractive index modification have been induced. For moderate laser powers, type I homogeneous waveguides are created. At higher pulse energies, type II waveguides are formed in the stressed area surrounding regions of laser-induced damage. Double-line and four-line structures are applied to the type II guides to increase mode confinement. Polarization sensitivity and transmission properties of the written waveguides are characterized and discussed. The results indicate that high-quality waveguides can be fabricated in KDP, which has potential for further applications in nonlinear integrated-optics.

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“…For most 3D PhCs suitable for the commercially relevant 1.55 μm wavelength, the desired voxel aspect ratio is 1. In future work, we will investigate various ways to reduce this ratio, including the use of a spatial light modulator (SLM) for adaptive beam shaping and dark field illumination schemes [36,37]. The stimulated emission depletion (STED) technique [38,39] could also be configured to improve aspect ratio although is best for improving lateral resolution.…”

Section: Discussionmentioning

confidence: 99%

Evidence of near-infrared partial photonic bandgap in polymeric rod-connected diamond structures

Chen¹,

Taverne²,

Xu³

et al. 2015

Opt. Express

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This is the final published version of the article (version of record). It first appeared online via OSA at https://www.osapublishing.org/oe/abstract.cfm ?uri=oe-23-20-26565. Please refer to any applicable terms of use of the publisher. University of Bristol -Explore Bristol Research General rightsThis document is made available in accordance with publisher policies. Please cite only the published version using the reference above. Full terms of use are available: http://www.bristol.ac.uk/pure/about/ebr-terms Evidence of near-infrared partial photonic bandgap in polymeric rod-connected diamond structures References and links

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Active aberration- and point-spread-function control in direct laser writing

Cited by 46 publications

References 21 publications

Three‐Dimensional μ‐Printing: An Enabling Technology

Three‐Dimensional μ‐Printing: An Enabling Technology

Waveguide fabrication in KDP crystals with femtosecond laser pulses

Evidence of near-infrared partial photonic bandgap in polymeric rod-connected diamond structures

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