Transmission Electron Microscopy in Micro‐Nanoelectronics 2012
DOI: 10.1002/9781118579022.ch1
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Active Dopant Profiling in the TEM by Off‐Axis Electron Holography

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“…(2): (1) the mean inner potential (MIP), (2) the potential variation due to local redistribution of free charge carriers (V E ), (3) the potential contribution due to crystal lattice distortions (V Dist ), and finally, (4) the potential variation caused by electrostatic fields in and around the specimen (V Fields ), e.g., due to charging [32]. Thus, the separation of contributions is generally not trivial.…”
Section: +mentioning
confidence: 99%
“…(2): (1) the mean inner potential (MIP), (2) the potential variation due to local redistribution of free charge carriers (V E ), (3) the potential contribution due to crystal lattice distortions (V Dist ), and finally, (4) the potential variation caused by electrostatic fields in and around the specimen (V Fields ), e.g., due to charging [32]. Thus, the separation of contributions is generally not trivial.…”
Section: +mentioning
confidence: 99%