Optical Measurement Systems for Industrial Inspection XI 2019
DOI: 10.1117/12.2525981
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Active illumination focus variation

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Cited by 9 publications
(9 citation statements)
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“…demonstrated a 9x reduction in acquisition time for coherence scanning interferometry of inline R2R topography measurement by replacing broadband white light with monochromatic light. [ 85 ] However, even with the reduced acquisition time each measurement frame still required two seconds to complete the mechanical vertical scan of the interferometry objective and therefore is not appropriate for uninterrupted inline measurement.…”
Section: Inline Roll‐to‐roll Metrology Techniquesmentioning
confidence: 99%
“…demonstrated a 9x reduction in acquisition time for coherence scanning interferometry of inline R2R topography measurement by replacing broadband white light with monochromatic light. [ 85 ] However, even with the reduced acquisition time each measurement frame still required two seconds to complete the mechanical vertical scan of the interferometry objective and therefore is not appropriate for uninterrupted inline measurement.…”
Section: Inline Roll‐to‐roll Metrology Techniquesmentioning
confidence: 99%
“…• Focus variation microscopy (FVM): FVM is another wellestablished surface measurement technology that uses local contrast in narrow-depth-of-field 2D images to build up a 3D height map of a surface [61]. Current research in FVM technologies includes development of algorithms to improve measurement of, for example, smooth surfaces and vertical walls [62,63], as well as in measurement speed increases and measurement system size decreases to allow for in-process measurements [2]. A thorough review of recent advances in FVM technologies is available elsewhere [61].…”
Section: Optical Surface Measurement Technologiesmentioning
confidence: 99%
“…Research into CM is currently focussed on development of methods for calibration and adjustment of CM systems [65], as well as in integrating confocal technologies with other surface measurement technologies, such as FVM, by developing methods for performing simultaneous FVM and CM in a single scan [66]. Other technologies exist that are similar to CM, such as active illumination focus variation [62] and structured illumination microscopy [67], though these are less well established in industrial surface measurement. Non-scanning chromatic confocal technologies can also be used for surface measurement [68], though their applications are more abundant in the biomedical sector than in manufacturing due to the generally poorer precision exhibited by chromatic systems compared to imaging systems [68,69].…”
Section: Optical Surface Measurement Technologiesmentioning
confidence: 99%
“…optically-sectioned images [16]. However, the Hi-Lo technique is more robust because it can also be used for smooth surfaces (also found on AM, specially at fully melted regions), so only Hi-Lo results are presented in this paper.…”
Section: Optical Designmentioning
confidence: 99%