Active multilayer mirrors for reflectance tuning at extreme ultraviolet (EUV) wavelengths

Bayraktar, Muharrem; Wessels, W.A.; Lee, Chris; Goor, F.A. van; Koster, Gertjan; Rijnders, Guus; Bijkerk, F.

doi:10.1088/0022-3727/45/49/494001

Cited by 9 publications

(10 citation statements)

References 24 publications

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“…Integration on glass is of high importance in order to pave the way to integrate PZT on amorphous structures, such as SiO 2 that is commonly used in semiconductor devices and Mo/Si mirror coatings for extreme ultraviolet (EUV) photolithography. 10,11 Deposition of oxide films, including PZT, directly on Si substrates results in inter-diffusion of oxides into Si and formation of amorphous oxide layer in the substrate-film interface, therefore buffer layers are utilized to prevent the inter-diffusion process. STO and yttria-stabilized zirconia (YSZ)/CeO 2 are such buffer layers that are commonly used to integrate epitaxial PZT films on Si substrates.…”

Section: Manuscriptmentioning

confidence: 99%

Nanosheet controlled epitaxial growth of PbZr0.52Ti0.48O3 thin films on glass substrates

Bayraktar

Chopra

Bijkerk

et al. 2014

Applied Physics Letters

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Integration of PbZr 0.52 Ti 0.48 O 3 (PZT) films on glass substrates is of high importance for device applications. However, to make use of the superior ferro-and piezoelectric properties of PZT, welloriented crystalline or epitaxial growth with control of the crystal orientation is a prerequisite. In this article, we report on epitaxial growth of PZT films with (100)-and (110)-orientation achieved by utilizing Ca 2 Nb 3 O 10 (CNO) and Ti 0.87 O 2 (TO) nanosheets as crystalline buffer layers. Fatigue measurements demonstrated stable ferroelectric properties of these films up to 5×10 9 cycles. (100)oriented PZT films on CNO nanosheets show a large remnant polarization of 21 μC/cm 2 that is the highest remnant polarization value compared to (110)-oriented and polycrystalline films reported in this work. A piezoelectric response of 98 pm/V is observed for (100)-oriented PZT film which is higher than the values reported in the literature on Si substrates.

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Section: Manuscriptmentioning

confidence: 99%

Nanosheet controlled epitaxial growth of PbZr0.52Ti0.48O3 thin films on glass substrates

Bayraktar

Chopra

Bijkerk

et al. 2014

Applied Physics Letters

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“…These properties make it a promising candidate for transparent conducting electrodes, required for touch screens, and, potentially EUV adaptive optics. Furthermore, the high transparency in the EUV range is attractive because most optics require a protective top layer to protect them from the highly reactive environment, induced by radiation [15].…”

Section: Introductionmentioning

confidence: 99%

Aromatic structure degradation of single layer graphene on an amorphous silicon substrate in the presence of water, hydrogen and Extreme Ultraviolet light

Mund

Sturm

Lee

et al. 2018

Applied Surface Science

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In this paper we study the reaction of water and graphene under Extreme Ultraviolet (EUV) irradiation and in the presence of hydrogen. In this work, single layer graphene (SLG) on amorphous Si as an underlying substrate was dosed with water (0.75 mL) and exposed to EUV (= 13.5 nm, 92 eV) with partial pressures of H 2 in the background. The results show that the aromatic structure of graphene, when exposed to EUV and H 2 , breaks down into aryl ketones and enols of 1,3 di-ketone. Infrared (IR) spectroscopy shows that SLG oxidizes, with increasing H 2 pressure leading to the grain boundary edges of graphene forming ketones and carboxylic acids. In situ and post exposure analyses also reveal that EUV exposure reduces the sp 2 content of the graphene layer, with the sp 3 content increasing, resulting in a more defective graphene layer.

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“…Nowadays piezoelectric ceramics and thin films are widely applied in sensors, actuators, ferroelectric memories, and energy harvesters. [1][2][3][4][5][6][7][8] Especially PbZr x Ti 1-x O 3 (PZT) is commonly used because of its remarkable piezoelectric properties both in ceramics and thin films. [9][10][11] One of the challenges in the application of piezoelectric materials is the hysteresis that manifests itself, for example, as positioning inaccuracy of actuators and energy loss in energy harvesting applications.…”

Section: Introductionmentioning

confidence: 99%

Hysteresis, Loss and Nonlinearity in Epitaxial PbZr_0.55Ti_0.45O₃ Films: A Polarization Rotation Model

Lucke

Bayraktar

Birkhölzer

et al. 2020

Adv Funct Materials

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The phenomena of hysteresis, ferroelectric loss, and nonlinearity are investigated for the strain and polarization of a monoclinic, epitaxial Pb(Zr,Ti)O 3 film over the 70 Hz to 5 kHz frequency range at sub-coercive excitation fields and zero electrical bias. For the strain, a linear hysteretic behavior is found, whereas the polarization shows a strongly nonlinear hysteretic behavior. In contrast to polycrystalline structures (for instance in ceramics or chemical solution deposited thin films), the commonly referred Rayleigh model cannot explain the observed behavior. A new model is presented, based on the rotation of the polarization vector within the monoclinic or rhombohedral unit cell under an applied electric field, with the viscous interaction of domains accompanying the unit cell deformation. The model explains the amplitude and frequency scaling of the strain, polarization, and loss tangent as well as the observed higher harmonics of polarization in the measured epitaxial Pb(Zr,Ti)O 3 films. It is concluded that the nonlinear response and the hysteretic loss originate from two separate physical processes. The nonlinear response is attributed to the nonlinear angular rotation of the polarization vector, whereas the hysteresis and ferroelectric loss are due to a viscous interaction of domains while the polarization vector is rotating.

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Active multilayer mirrors for reflectance tuning at extreme ultraviolet (EUV) wavelengths

Cited by 9 publications

References 24 publications

Nanosheet controlled epitaxial growth of PbZr0.52Ti0.48O3 thin films on glass substrates

Nanosheet controlled epitaxial growth of PbZr0.52Ti0.48O3 thin films on glass substrates

Aromatic structure degradation of single layer graphene on an amorphous silicon substrate in the presence of water, hydrogen and Extreme Ultraviolet light

Hysteresis, Loss and Nonlinearity in Epitaxial PbZr_0.55Ti_0.45O₃ Films: A Polarization Rotation Model

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Active multilayer mirrors for reflectance tuning at extreme ultraviolet (EUV) wavelengths

Cited by 9 publications

References 24 publications

Nanosheet controlled epitaxial growth of PbZr0.52Ti0.48O3 thin films on glass substrates

Nanosheet controlled epitaxial growth of PbZr0.52Ti0.48O3 thin films on glass substrates

Aromatic structure degradation of single layer graphene on an amorphous silicon substrate in the presence of water, hydrogen and Extreme Ultraviolet light

Hysteresis, Loss and Nonlinearity in Epitaxial PbZr0.55Ti0.45O3 Films: A Polarization Rotation Model

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Hysteresis, Loss and Nonlinearity in Epitaxial PbZr_0.55Ti_0.45O₃ Films: A Polarization Rotation Model