The development of new sterilization methods is still a major topic. The need for new techniques arises from the development of new instruments and the usage of different materials. Especially in the case of plastics with their beneficial properties, for example, in the field of implantology, plasma sterilization is seen as a promising alternative to the standard methods. However, 50 years after the first patent and although low‐pressure plasmas show excellent inactivation performance (>log 6 reduction), only one commercial system is available on the market for a distinct application. We will give a short review about known plasma sterilization mechanisms, the different plasma sterilization systems in use, analyze possible challenges for an industrial process and comment on possible solutions for a broader acceptance and utilization of low‐pressure plasma sterilization.