Adaptive optics in laser processing

Salter, Patrick S.; Booth, Martin J.

doi:10.1038/s41377-019-0215-1

Cited by 211 publications

(86 citation statements)

References 182 publications

(216 reference statements)

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“…After the integration of BSA, the gripper becomes open due to the contraction of BSA muscles in air. Taking advantage of the programmable fabrication capability 44,45,51,52 , the internal networks of the polymeric structure can be further controlled at nanoscale by varying the laser scanning step length. In this way, both the elasticity of BSA muscles and the stiffness of SU-8 skeletons can be precisely tuned.…”

Section: Resultsmentioning

confidence: 99%

Femtosecond laser programmed artificial musculoskeletal systems

et al. 2020

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Natural musculoskeletal systems have been widely recognized as an advanced robotic model for designing robust yet flexible microbots. However, the development of artificial musculoskeletal systems at micro-nanoscale currently remains a big challenge, since it requires precise assembly of two or more materials of distinct properties into complex 3D micro/nanostructures. In this study, we report femtosecond laser programmed artificial musculoskeletal systems for prototyping 3D microbots, using relatively stiff SU-8 as the skeleton and pH-responsive protein (bovine serum albumin, BSA) as the smart muscle. To realize the programmable integration of the two materials into a 3D configuration, a successive on-chip two-photon polymerization (TPP) strategy that enables structuring two photosensitive materials sequentially within a predesigned configuration was proposed. As a proof-of-concept, we demonstrate a pH-responsive spider microbot and a 3D smart micro-gripper that enables controllable grabbing and releasing. Our strategy provides a universal protocol for directly printing 3D microbots composed of multiple materials.

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Section: Resultsmentioning

confidence: 99%

Femtosecond laser programmed artificial musculoskeletal systems

et al. 2020

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“…The efficiency of O-FIB is only limited by the laser repetition rate and the speed of the light polarization modulation. The far-field writing characteristic of O-FIB provides inherent compatibility with digital micromirror devices or spatial light modulators, which can achieve a higher manufacturing speed by manipulating multiple foci in parallel 36,37 .…”

Section: Large-area Printing Modementioning

confidence: 99%

O-FIB: far-field-induced near-field breakdown for direct nanowriting in an atmospheric environment

et al. 2020

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Nanoscale surface texturing, drilling, cutting, and spatial sculpturing, which are essential for applications, including thin-film solar cells, photonic chips, antireflection, wettability, and friction drag reduction, require not only high accuracy in material processing, but also the capability of manufacturing in an atmospheric environment. Widely used focused ion beam (FIB) technology offers nanoscale precision, but is limited by the vacuum-working conditions; therefore, it is not applicable to industrial-scale samples such as ship hulls or biomaterials, e.g., cells and tissues. Here, we report an optical far-field-induced near-field breakdown (O-FIB) approach as an optical version of the conventional FIB technique, which allows direct nanowriting in air. The writing is initiated from nanoholes created by femtosecondlaser-induced multiphoton absorption, and its cutting "knife edge" is sharpened by the far-field-regulated enhancement of the optical near field. A spatial resolution of less than 20 nm (λ/40, with λ being the light wavelength) is readily achieved. O-FIB is empowered by the utilization of simple polarization control of the incident light to steer the nanogroove writing along the designed pattern. The universality of near-field enhancement and localization makes O-FIB applicable to various materials, and enables a large-area printing mode that is superior to conventional FIB processing.

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“…Besides vectorial and temporal coupling, other degrees of freedom emerge from the manipulation of spatial phase properties. Applying propagation corrections and controlling the focal geometries [157,158] extrapolated to tight focusing will permit better control on the excitation gradients. Beyond the engineering of the shape of the focal plane [159], spatial phase control impacts particularly the field pattern in multibeam interference setups, determining flexibility in the pattern definition and hierarchical arrangements [160].…”

Section: Observation and Control: Dynamic Coupling Between Light And mentioning

confidence: 99%

Advances in ultrafast laser structuring of materials at the nanoscale

2020

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Laser processing implies the generation of a material function defined by the shape and the size of the induced structures, being a collective effect of topography, morphology, and structural arrangement. A fundamental dimensional limit in laser processing is set by optical diffraction. Many material functions are yet defined at the micron scale, and laser microprocessing has become a mainstream development trend. Consequently, laser microscale applications have evolved significantly and developed into an industrial grade technology. New opportunities will nevertheless emerge from accessing the nanoscale. Advances in ultrafast laser processing technologies can enable unprecedented resolutions and processed feature sizes, with the prospect to bypass optical and thermal limits. We will review here the mechanisms of laser processing on extreme scales and the optical and material concepts allowing us to confine the energy beyond the optical limits. We will discuss direct focusing approaches, where the use of nonlinear and near-field effects has demonstrated strong capabilities for light confinement. We will argue that the control of material hydrodynamic response is the key to achieve ultimate resolution in laser processing. A specific structuring process couples both optical and material effects, the process of self-organization. We will discuss the newest results in surface and volume self-organization, indicating the dynamic interplay between light and matter evolution. Micron-sized and nanosized features can be combined into novel architectures and arrangements. We equally underline a new dimensional domain in processing accessible now using laser radiation, the sub-100-nm feature size. Potential application fields will be indicated as the structuring sizes approach the effective mean free path of transport phenomena.

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Adaptive optics in laser processing

Cited by 211 publications

References 182 publications

Femtosecond laser programmed artificial musculoskeletal systems

Femtosecond laser programmed artificial musculoskeletal systems

O-FIB: far-field-induced near-field breakdown for direct nanowriting in an atmospheric environment

Advances in ultrafast laser structuring of materials at the nanoscale

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