Addressable failure site test structures (AFS-TS) for process development and optimization

Doong, K.Y.-Y.; Hsieh, Sunnys; Lin, Shio Jean; Shen, Binson; Chien-Jung, Wang; Ho, Yen-Hen; Cheng, J.Y.; Yang, Yeu-Haw; Miyamoto, Koji; Hsu, Chih Hung

doi:10.1109/icmts.2000.844404

Cited by 4 publications

(2 citation statements)

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“…individually connected to probe pads. The use of multiplexed technology characterization circuits has been reported in this conference as early as 1986 [1] and regularly since [2][3][4][5][6][7]. The main advantage of addressable arrays is that they are not probe-pad intensive, unlike passive test chips.…”

Section: Introductionmentioning

confidence: 99%

“…The Shorts and Opens Monitor (SOM) is a read-only addressable defect array that has been extensively used at IBM for general yield learning since the 90nm technology node. While the multiplexed test structures described in [1][2][3][4][5][6][7] feature only one or two aspects listed below, the SOM simultaneously offers all of the following: critical-area efficient design, reference resistors for in-situ calibration, defect localization, soft fail detection capability, and relatively short test time.…”

Section: Introductionmentioning

confidence: 99%

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32nm yield learning using addressable defect arrays

Karthikeyan

Cassels

Arie

2012

2012 IEEE International Conference on Microelectronic Test Structures

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The Shorts and Opens Monitor (SOM) is a read-only addressable defect array that is widely and effectively used as a yield monitor in technology development and early stage of manufacturing. The SOM consists of scan-chain input/output, fully stackable DUTs, reference resistors for calibration, and a robust periphery design. The area efficiency and defect localization capabilities of the SOM greatly enable characterization of top yield detractors in 32nm process technology.

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