Adhesion energy in nanogap InP∕InGaAs microcantilevers

Abstract

Investigation of capillary adhesion between the microcantilever and the substrate with electronic speckle pattern interferometry Appl.

Coupling of quantum states with mechanical heterostructures

“…One heterostructure is located on the underside of the cantilever, and the other on top of the substrate. Surface forces during etch release [21] cause the cantilever to collapse and form a gap whose width varies with position [22][23][24]. In regions where the gap is large, the quantum wells do not noticeably interact with each other, and the electronic structure is that of the individual wells.…”

Surface heterostructure nanomechanical actuators with atomic resolution

“…Previous research has shown that van der Waals forces across the nanogap do not contribute significantly to the deformation. 8 Thus Eq. ͑2͒ also applies to cantilevers collapsed across a nanogap.…”

“…The value of the adhesion energy at room temperature is similar to previous measurements. 8 Note that the influence of the relative humidity on the adhesion energy can be largely excluded because the experiments were conducted within such a short time interval that the relative humidity is almost certainly constant. Later measurement found the relative humidity to be 37%.…”

Stiction of a Nano-Beam with Surface Effect

“…From these data, one can see that the value of the adhesion energy is very sensitive to the slight variation of the detachment length, thus the measured surface energy is not accurate enough, and actually, in this experiment it is reported as 72 ± 16 mJ/m 2 . [13] In addition, our analyses can predict the capillary adhesion of two beams, where the previous result of the detachment length is given as 𝑠 = ( 3𝐸𝑒 3 𝑑 2 8𝛾 cos 𝜃 Y…”

“…[4,12] As a case in point, the adhesion energy between an InGaAs/InP cantilever and the substrate was measured around 72±16 mJm −2 , with the gap spacing on the order of 100 nm. [13] However, due to considerable surface area per unit volume in a low-dimensional nano-system, the surface effect is crucial to the physical and chemical properties of materials, such as the size-dependent Young's modulus. [14,15] Based upon the pioneering theory of surface-layered model developed by Gurtin and Murdoch, [16] extensive investigations of the nanowire bending have been performed adopting the Euler-Bernoulli and Timoshenko beam models to address the mechanical behavior of nanostructures.…”