2007
DOI: 10.1016/j.susc.2006.09.018
|View full text |Cite
|
Sign up to set email alerts
|

Adsorption and thermal chemistry of 1,1,1,5,5,5,-hexafluoro-2,4-pentanedione (hfacH) and (hexafluoroacetylacetonate)Cu(vinyltrimethylsilane) ((hfac)Cu(VTMS)) on TiCN-covered Si(100) surface

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1
1
1

Citation Types

1
30
0

Year Published

2007
2007
2021
2021

Publication Types

Select...
8

Relationship

2
6

Authors

Journals

citations
Cited by 19 publications
(31 citation statements)
references
References 29 publications
1
30
0
Order By: Relevance
“…Once the reactions of organometallic compounds are understood on an ordered substrate, the insight obtained for this reaction can be applied to more complex surfaces, as demonstrated in our study of [Cu(hfac)(vtms)] on TiCN films 6. 43, 44 Having entered the nanoscale age for film deposition and with molecular electronics emerging as a promising field to continue the improvement of electronic devices, chemistry is called upon to be the center of attention for its capacity to understand, design, and control the reactions involved in the formation of electronic devices at the atomic scale.…”
Section: Final Remarksmentioning
confidence: 97%
“…Once the reactions of organometallic compounds are understood on an ordered substrate, the insight obtained for this reaction can be applied to more complex surfaces, as demonstrated in our study of [Cu(hfac)(vtms)] on TiCN films 6. 43, 44 Having entered the nanoscale age for film deposition and with molecular electronics emerging as a promising field to continue the improvement of electronic devices, chemistry is called upon to be the center of attention for its capacity to understand, design, and control the reactions involved in the formation of electronic devices at the atomic scale.…”
Section: Final Remarksmentioning
confidence: 97%
“…The synthesis of Cu(I) and Ag(I) metal organic complexes is commonly achieved by reacting a transition metal salt with the desired oxidation state with a combination of an anionic ligand and a -donor ligand in a one-pot reaction followed by purification [163][164][165][166][167][168][169][170][171][172][173][174][175][176][177][178]. Similarly, Cu(II) MC precursors are obtained in an analogous manner from Cu(II) salts [179][180][181][182].…”
Section: Metal Complexes Applicable To Inkjet Ink Formulationsmentioning
confidence: 99%
“…3.40, it was concluded that the remaining species is the hfac ligand bonded to a copper atom, which is in turn bound to silicon surface, structure A [356]. These findings were later expanded to explain the structural characteristics of thin diffusion barrier film, TiCN [360][361][362], and to understand the chemical reactivity of its surface [363,364] with respect to the copper deposition process. Most of the other investigations of the effects of a metal presence on the chemistry of organometallic molecules are related to the chemistry of deposition of metals and metal compounds onto silicon.…”
Section: Effect Of Metal Atoms On the Pathways Of Chemical Reactions mentioning
confidence: 99%