Adsorption–desorption kinetics of the monomer–dimer mixture

Boscoboinik, J. Anibal; Manzi, Sergio Javier; Pereyra, V.

doi:10.1016/j.physa.2009.12.018

Cited by 4 publications

(2 citation statements)

References 21 publications

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“…In general two concepts of adsorption, physical and chemistry adsorption models will be considered. A detailed review of various adsorption kinetics (adsorption, desorption) models was given in [6]- [7]. In this model the transport towards the surface is purely diffusive and we investigate the concentration in the internal area of FOUPs by using the thermodynamics laws.…”

Section: Model Settingsmentioning

confidence: 99%

Coupled system of PDEs to predict the sensitivity of some materials constituents of FOUP with the AMCs cross-contamination

Santatriniaina

Deseure²,

Nguyen³

et al. 2014

International Journal of Applied Mathematical Research

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This paper deals a predictive model using modeling and computational methods to investigate the sensitivity of some materials constituents of the FOUP with the AMCs cross contamination. Required numerical tools which are employed in order to study the AMCs cross-contamination transfer phenomena between wafers and FOUPs were developed. Numerical optimization and finite elements formulation in transient analysis were established. Analytical solution of one dimensional problem was developed and the calibration process of physical constants was performed. This mode was used to study the sensitivity of some material with the cross contamination. The behavior of the AMCs in transient analysis was determined. The model framework preserves the classical forms of the diffusion and convection-diffusion equations and yields to consistent form of the Fick's law. The adsorption kinetics of the contaminant on the surface (interface contaminant/polymer) was assumed. The adsorption process and the surface roughness effect were also traduced as a boundary condition using the switch condition Dirichlet to Neumann and the interface condition. Many tests of contamination processes were assumed in order to study the sensitivity of the materials. Optimization methods with analytical solution were used to define physical constants for each material versus contaminant. Finite element methods including adsorption kinetic were also used and by using Henry law on the interface and the switch of Dirichlet to Neumann conditions.

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Section: Model Settingsmentioning

confidence: 99%

Coupled system of PDEs to predict the sensitivity of some materials constituents of FOUP with the AMCs cross-contamination

Santatriniaina

Deseure²,

Nguyen³

et al. 2014

International Journal of Applied Mathematical Research

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show abstract

“…The FOUP is made with a porous polymers materials well-known with its adsorption and outgass properties [1]- [2], [5]- [6]. These physical phenomena are traduced by sorption phenomena as adsorption and desorption [7], [8]. They are also able to absorb volatile compounds present in their atmosphere coming from the connection to an equipment or from the release of wafers post processed [1]- [4], [9].…”

Section: Introductionmentioning

confidence: 99%

Dynamic boundary conditions for a coupled convection-diffusion model with heat effects: applications in cross-contamination control

Santatriniaina¹,

Deseure²,

Nguyen³

et al. 2015

IJAMR

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This work investigates the mass transfer of the Airborne Molecular cross Contamination (AMCs) between the Front Opening Unified Pod (FOUP) and wafer (silicon substrates) during the microelectronics devices manufacturing using dynamic boundary conditions. Such cross-contamination phenomena lead to detrimental impact on production yield in microelectronic industry and a predictive approach using modelling and computational methods is a very strong way to understand and qualify the AMCs cross contamination processes. The FOUP is made of polymeric materials and it is considered as a heterogeneous porous media, it can asorb and desorb the contaminant, thus the modelled processes are the contamination of two-component in transient flow. Coupled diffusion and convection-diffusion model with heat effects are used to define the phenomena. The present methodology is, first using the optimization methods with the numerical solution in order to define the physical constants of various materials which have been studied experimentally and separately, and the second using the finite element methods including these physical constants and relevant interface condition in order to take into account the adsorption kinetics law. Numerical methods to solve the problem are proposed. The dynamics behavior of the AMCs analysis was determined thanks to the switch of Dirichlet to Neumann condition. The mathematical model preserves the classical forms of the diffusion and convection diffusion equations and yields to consistent form of the Fick's law. The computed results are in correlation with the experimental measurements. Some numerical results are presented in this work.

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Generalized adsorption isotherms for molecular and dissociative adsorption of a polar molecular species on two polar surface geometries: Perovskite (100) (Pm-3m) and fluorite (111) (Fm-3m)

Danielson

Hin

Savara

2016

The Journal of Chemical Physics

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Lattice based kinetic Monte Carlo simulations have been used to determine a functional form for the second order adsorption isotherms on two commonly investigated crystal surfaces: the (111) fluorite surface and the (100) perovskite surface which has the same geometric symmetry as the NaCl (100) surface. The functional form is generalized to be applicable to all values of the equilibrium constant by a shift along the pressure axis. Functions have been determined for estimating the pressure at which a desired coverage would be achieved and, conversely, for estimating the coverage at a certain pressure. The generalized form has been calculated by investigating the surface adsorbate coverage across a range of thermodynamic equilibrium constants that span the range 10−26 to 1013. The equations have been shown to be general for any value of the adsorption equilibrium constant.

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Adsorption–desorption kinetics of the monomer–dimer mixture

Cited by 4 publications

References 21 publications

Coupled system of PDEs to predict the sensitivity of some materials constituents of FOUP with the AMCs cross-contamination

Coupled system of PDEs to predict the sensitivity of some materials constituents of FOUP with the AMCs cross-contamination

Dynamic boundary conditions for a coupled convection-diffusion model with heat effects: applications in cross-contamination control

Generalized adsorption isotherms for molecular and dissociative adsorption of a polar molecular species on two polar surface geometries: Perovskite (100) (Pm-3m) and fluorite (111) (Fm-3m)

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