Advanced characterization of carrier profiles in germanium using micro-machined contact probes

Clarysse, Trudo; Konttinen, Mikko; Parmentier, Brigitte; Moussa, Alain; Vandervorst, Wilfried; Impellizzeri, G.; Napolitani, E.; Nielsen, Peter Brønnum; Petersen, Dirch Hjorth; Hansen, Ole

doi:10.1063/1.4766516

AIP Conference Proceedings

2012

DOI: 10.1063/1.4766516

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Advanced characterization of carrier profiles in germanium using micro-machined contact probes

Trudo Clarysse¹,

Mikko Konttinen²,

Brigitte Parmentier³

et al.

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Advanced characterization of carrier profiles in germanium using micro-machined contact probes

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