Advanced generation of rotatable magnetron technology for high performance reactive sputtering

Nadel, S.; Greene, P.D.; Rietzel, J.; Perata, M.; Malaszewski, L.; Hill, Russell J.

doi:10.1016/j.tsf.2005.07.227

Cited by 7 publications

(3 citation statements)

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“…As the target is sputtered, its characteristics also change, so the deposition conditions such as the layer thickness and the film morphology are expected to change during the lifetime of the target [142]. To overcome this hurdle, moving targets/magnet systems have been developed, with almost 80% usage for flat targets [150], and more than 90% in cylindrical rotating targets [151].…”

Section: 2 Reactive Magnetron Sputtering Depositionmentioning

confidence: 99%

Gas Sensors Based on Localized Surface Plasmon Resonances: Synthesis of Oxide Films with Embedded Metal Nanoparticles, Theory and Simulation, and Sensitivity Enhancement Strategies

et al. 2021

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This work presents a comprehensive review on gas sensors based on localized surface plasmon resonance (LSPR) phenomenon, including the theory of LSPR, the synthesis of nanoparticle-embedded oxide thin films, and strategies to enhance the sensitivity of these optical sensors, supported by simulations of the electromagnetic properties. The LSPR phenomenon is known to be responsible for the unique colour effects observed in the ancient Roman Lycurgus Cup and at the windows of the medieval cathedrals. In both cases, the optical effects result from the interaction of the visible light (scattering and absorption) with the conduction band electrons of noble metal nanoparticles (gold, silver, and gold–silver alloys). These nanoparticles are dispersed in a dielectric matrix with a relatively high refractive index in order to push the resonance to the visible spectral range. At the same time, they have to be located at the surface to make LSPR sensitive to changes in the local dielectric environment, the property that is very attractive for sensing applications. Hence, an overview of gas sensors is presented, including electronic-nose systems, followed by a description of the surface plasmons that arise in noble metal thin films and nanoparticles. Afterwards, metal oxides are explored as robust and sensitive materials to host nanoparticles, followed by preparation methods of nanocomposite plasmonic thin films with sustainable techniques. Finally, several optical properties simulation methods are described, and the optical LSPR sensitivity of gold nanoparticles with different shapes, sensing volumes, and surroundings is calculated using the discrete dipole approximation method.

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Section: 2 Reactive Magnetron Sputtering Depositionmentioning

confidence: 99%

Gas Sensors Based on Localized Surface Plasmon Resonances: Synthesis of Oxide Films with Embedded Metal Nanoparticles, Theory and Simulation, and Sensitivity Enhancement Strategies

et al. 2021

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“…The use of precision impedance analyzer Magnetron Sputtering Ni film volume resistivity, volume resistivity curves of different optical attenuator polishing time, Characterization binding force between the film and the Ni sputtering SiO2 substrate strength [11], Figure 5. As can be seen from Figure 5, a lot of small sample volume resistivity than silica glass, good electrical properties, proved that after polishing, the Ni film did not fall off, and the polishing time increases, the volume resistivity of the less volatile sample , indicating a strong binding force between the magnetron sputtering method to obtain an Ni film and the substrate, and the rub resistance of the Ni film is relatively good.…”

Section: Ni Film and The Substrate Binding Analysismentioning

confidence: 99%

Compared to Performance of Ni / SiO₂Optical Attenuator by Two Preparing Methods

Dong

Tang

et al. 2016

MATEC Web Conf.

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Abstract. In this paper, the preparation of Ni / SiO2 optical attenuator using two kinds of process, were discussed for electroless plating and magnetron sputtering technology, by analyzing Ni film appearance , surface morphology, film composition, SiO2 substrate and Ni film adhesion, known magnetron sputtering Ni film in all aspects of performance are better than electroless plating Ni film. Electroless plating Ni film quality not up to such requirements, can not be used in the practice. Conclusions: performance of Ni / SiO2 Optical Attenuator more practical and reliable by magnetron sputtering process preparing.

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“…Although low cost indium free TCO electrodes, such as Al-doped ZnO (AZO) and Ga-doped ZnO (GZO) films grown by batch-type magnetron sputtering, have been suggested as potential low cost anode materials for OSCs, their low power conversion efficiency (PCE), severe reaction with acidic PEDOT : PSS solution and low efficiency of the conventional sputtering process still remain as drawbacks [3][4][5][6]. Recently, cylindrical rotating magnetron sputtering (CRMS) has attracted a great deal of attention as a costefficient sputtering technique for photovoltaics, due to its high target usage of more than 80%, process stability and enhanced process efficiency [7,8]. However, there have been few studies on investigation of the preparation of AZO electrodes by the CRMS and the fabrication of OSCs on the CRMS-grown AZO electrodes, which would be beneficial for the low-cost production of OSCs.…”

Section: Introductionmentioning

confidence: 99%

An Al-doped ZnO electrode grown by highly efficient cylindrical rotating magnetron sputtering for low cost organic photovoltaics

Park¹,

Ahn²,

Park³

et al. 2010

J. Phys. D: Appl. Phys.

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We report the characteristics of Al-doped zinc oxide (AZO) films prepared by a highly efficient cylindrical rotating magnetron sputtering (CRMS) system for use as a transparent conducting electrode in cost-efficient bulk hetero-junction organic solar cells (OSCs). Using a rotating cylindrical type cathode with an AZO target, whose usage was above 80%, we were able to obtain a low cost and indium free AZO electrode with a low sheet resistance of ∼4.59 Ω/sq, a high transparency of 85% in the visible wavelength region and a work function of 4.9 eV at a substrate temperature of 230 °C. Moreover, the neutral poly(3,4-ethylenedioxythiophene) : poly(styrenesulfonate) based OSC fabricated on the CRMS-grown AZO electrode at 230 °C showed an open circuit voltage of 0.5 V, a short circuit current of 8.94 mA cm−2, a fill factor of 45% and power conversion efficiency of 2.01%, indicating that CRMS is a promising cost-efficient AZO deposition technique for low cost OSCs.

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Advanced generation of rotatable magnetron technology for high performance reactive sputtering

Cited by 7 publications

References 0 publications

Gas Sensors Based on Localized Surface Plasmon Resonances: Synthesis of Oxide Films with Embedded Metal Nanoparticles, Theory and Simulation, and Sensitivity Enhancement Strategies

Gas Sensors Based on Localized Surface Plasmon Resonances: Synthesis of Oxide Films with Embedded Metal Nanoparticles, Theory and Simulation, and Sensitivity Enhancement Strategies

Compared to Performance of Ni / SiO₂Optical Attenuator by Two Preparing Methods

An Al-doped ZnO electrode grown by highly efficient cylindrical rotating magnetron sputtering for low cost organic photovoltaics

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Advanced generation of rotatable magnetron technology for high performance reactive sputtering

Cited by 7 publications

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Gas Sensors Based on Localized Surface Plasmon Resonances: Synthesis of Oxide Films with Embedded Metal Nanoparticles, Theory and Simulation, and Sensitivity Enhancement Strategies

Gas Sensors Based on Localized Surface Plasmon Resonances: Synthesis of Oxide Films with Embedded Metal Nanoparticles, Theory and Simulation, and Sensitivity Enhancement Strategies

Compared to Performance of Ni / SiO2Optical Attenuator by Two Preparing Methods

An Al-doped ZnO electrode grown by highly efficient cylindrical rotating magnetron sputtering for low cost organic photovoltaics

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Compared to Performance of Ni / SiO₂Optical Attenuator by Two Preparing Methods