Advanced laser micromachining processes for MEMS and optical applications

Holmes, Andrew S.; Pedder, J. E. A.; Boehlen, Karl L.

doi:10.1117/12.682929

Cited by 15 publications

(11 citation statements)

References 13 publications

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“…The RapidX-250 series of KrF Excimer micromachining is used in this research as part of an Excimer laser system. The most important aspects provided by laser pulsed micromachining include good quality at high resolutions, high precision, high process speeds, low thermal damage and applicability to many materials (Holmes, Pedder, & Boehlen, 2006). Besides, it also allows for highly flexible Computer Numerical Control (CNC) programming depending on prototyping shapes, and requires few processing steps, smaller cleanroom facilities and fewer hazardous human substances.…”

Section: Methodsmentioning

confidence: 99%

Fabrication of a cost-effective MEMS-based piezoresistive cantilever sensor for gait movement analysis

Mahayudin

Saadon

Wahab

et al. 2016

MoHE

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Gait analysis measurement is a method to access and identify gait events and the measurements of motion parameters involving the lower part of body. This significant method is widely used in rehabilitation, sports as well as health diagnostic towards improving the quality of life. However, it is not routine practice due to costs involved in creating and using gait labs. Alternatively, inertial sensors such as micro cantilever accelerometer can be used in the development of cheap and wearable gait analysis systems. Human stride segmentation measurement based on micro-accelerometer cantilever is used in the study of the lower limb movement patterns that include walk, jump and run; and the measurements of the motion parameters. A complete system consists of a fabricated sensor, a Wheatstone bridge circuit and a signal amplifier tailored for real-time stride analysis measurement is proposed. The novel fabrication method of an accelerometer sensor using laser micromachining is introduced in order to develop a simple way in realizing the sensor formation. This study allows us to optimize the requirements of hard-mask and fabrication process steps by reduction of 30% and 25% respectively. In the general framework, this research activity is focused towards development of piezoresistive cantilever formation using laser micromachining for fast fabrication development for real life gait and stride segmentation measurement application.

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Section: Methodsmentioning

confidence: 99%

Fabrication of a cost-effective MEMS-based piezoresistive cantilever sensor for gait movement analysis

Mahayudin

Saadon

Wahab

et al. 2016

MoHE

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“…The system used in this research is shown in Figure 1 which consists of mechanical parts and X-Y stages orientation controlled by user friendly software. The frequency of the laser emission is sufficiently energetic to break the chemical bonds of most materials [4]. As shown in Figure 2, laser pulses are bombarded on the silicon surface.…”

Section: Excimer Laser Micromahinementioning

confidence: 99%

KrF Excimer Laser Micromachining of Silicon for Micro-Cantilever Applications

Mahayudin¹,

Wahab²,

Hamzah³

et al. 2014

Proceedings of International Electronic Conference on Sensors and Applications

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The conventional photolithography of crystalline silicon techniques is limited to two-dimensional and structure scaling. This can be overcome by using laser micromachine, a technique capable of producing three-dimensional structure and simultaneously avoiding the needs for photomasks. In this paper, we report on the use of RapidX-250 excimer laser micromachine with 248 nm KrF to create in-time mask design and assisting in the fabrication of micro-cantilever structures. Three parameters of the laser micromachine used to aid the fabrication of the micro-cantilever have been investigated; namely the pulse rate (i.e. number of laser pulses per second), laser energy and laser beam size. Preliminary results show that the 35 um beam size and 15 mJ of energy level is the most effective parameter to structure the desired pattern. The parallel lines spacing of the structure can be reached up to 10 um while cutting, holes drilling and structuring the cantilever using the laser beam can be accomplished to as low as 50 um in dimension.

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“…Takeuchi et al [10] developed a sophisticated six-axis NC machining center for micro-grooving on sculptured surfaces for optical devices. Holmes et al [11] introduced projection ablation methods, such as synchronous image scanning and half-tone masks, to achieve 3D structuring with complex profiles. Groenendijk [12] integrated a five-axis motion stage to achieve laser abla tion on free-form surfaces while Hao et al [13] developed a rolling-exposure lithography technique to create large-scale 3D microstructures on cylindrical objects.…”

Section: Introductionmentioning

confidence: 99%

Fast Generation of Micro-Channels on Cylindrical Surfaces by Elliptical Vibration Texturing

Guo

Lü

Pei

et al. 2014

Journal of Manufacturing Science and Engineering

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Micro-structured surfaces are assuming an ever-increasing role since they define the ulti mate performance o f many industrial components and products. Micro-channels, in par ticular, have many potential applications in micro-fluidic devices, micro heat exchangers, and friction control. This paper proposes an innovative vibration-assisted machining method to generate micro-channels on the external surface o f a cylinder. This method, referred to as elliptical vibration texturing, was originally developed by the authors to generate dimple patterns. It uses the modulation o f the depth-of-cut by tool vibrations to create surface textures. The most promising features o f the proposed method are its high efficiency, low cost, and scalability fo r mass production. It is shown that with proper combinations o f the process parameters the created dimples start to overlap and form channels. An analytical model is established to predict channel formation with respect to the overlapping ratios o f the dimples. Channel formation criteria and expres sions fo r channel geometries are given along with a channel generation map that relates channel geometry to the process parameters. Experimental results are given to verify the model. A further example o f micro-pattern generation is also given to showcase the flexi bility o f the process.

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Advanced laser micromachining processes for MEMS and optical applications

Cited by 15 publications

References 13 publications

Fabrication of a cost-effective MEMS-based piezoresistive cantilever sensor for gait movement analysis

Fabrication of a cost-effective MEMS-based piezoresistive cantilever sensor for gait movement analysis

KrF Excimer Laser Micromachining of Silicon for Micro-Cantilever Applications

Fast Generation of Micro-Channels on Cylindrical Surfaces by Elliptical Vibration Texturing

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