a b s t r a c tWe report the development and testing of a collector arrangement for quadrupole inductively coupled plasma mass spectrometry (ICP-MS) that for the first time has been used to isolate small quantities of highly enriched (>99.99%) single isotopes, with deposition rates >10 ng h −1 . The collector assembly replaces the standard instrument detector allowing for implantation with simultaneous monitoring of the incident ion current. Even under zero bias implant conditions, low energy (<10 eV) ion collection efficiency was observed to be very high 99%. 151 Eu ion currents of 0.1-0.5 nA were collected on a simple, planar foil without resorting to any type of cup configuration. Recovery of the enriched isotope from such foils is much simpler than from a more complex cup configuration. High rejection of adjacent mass isotopes was demonstrated by selectively implanting 167 Er, then using laser ablation ICP-MS imaging to confirm the absence of any co-implanted 166 Er or 168 Er. The important analytical possibilities of this new approach to isotope ratio measurement, tracer purification, and radiation measurements are discussed.