2020
DOI: 10.1111/ijag.14979
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Advances in femtosecond laser processing of optical material for device applications

Abstract: Femtosecond laser induced changes and writing in optical materials have proven to be an excellent route to the production of high-quality micro-and nanofabrication of functional devices. In this paper we present the latest advancements in femtosecond laser processing of optical materials for device applications. We look at femtosecond direct laser writing for photonic device fabrication in fused silica and active glasses.We also discuss femtosecond laser writing and wet chemical etching in fused silica, Fotura… Show more

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Cited by 26 publications
(11 citation statements)
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“…The field of integrated optics is continually developing at a rapid pace and constantly attracts considerable interest in applied and basic research. [ 1 ] Especially femtosecond laser inscription of optical elements inside of planar silica or crystal substrates has evolved to a mature technology [ 2 ] including applications in optical sensing, [ 3 ] telecommunication, [ 4 ] quantum computing [ 5 ] or astronomy. [ 6 ] Based on nonlinear absorption of the laser pulse energy, a localized change of the refractive index can be achieved inside of a transparent material.…”
Section: Introductionmentioning
confidence: 99%
“…The field of integrated optics is continually developing at a rapid pace and constantly attracts considerable interest in applied and basic research. [ 1 ] Especially femtosecond laser inscription of optical elements inside of planar silica or crystal substrates has evolved to a mature technology [ 2 ] including applications in optical sensing, [ 3 ] telecommunication, [ 4 ] quantum computing [ 5 ] or astronomy. [ 6 ] Based on nonlinear absorption of the laser pulse energy, a localized change of the refractive index can be achieved inside of a transparent material.…”
Section: Introductionmentioning
confidence: 99%
“…A large number of techniques have been employed with the aim of fabricating waveguide structures with high optical performances [21][22][23]. Femtosecond laser inscription (FLI) has emerged as an unprecedented three dimensional (3D) waveguide fabrication technology, which can be manifested in plentiful transparent materials [21,[24][25][26][27]. During the FLI process, high optical energy at the laser focus would be deposited inside the materials due to the nonlinear multi-photon absorption, resulting in a highly localized structural modification to the materials, one example of which is refractive index (RI) change that is responsible for the formation of waveguide structures [28,29].…”
Section: Introductionmentioning
confidence: 99%
“…Direct laser writing (DLW) is a suitable technique for three-dimensional (3D) micro-and even nanostructuring [13]. Femtosecond laser processing for optical materials is a good technology to the production of high-quality micro-and nanofabrication of functional devices [14]. Femtosecond Laser Processing of Nano-Crystalline CVD Diamond Coating was studied [15].…”
Section: Introductionmentioning
confidence: 99%