AeroMEMS sensor array for high-resolution wall pressure measurements

Berns, Andreas; Buder, U.; Obermeier, Ε.; Wolter, Andreas; Leder, Alfred

doi:10.1016/j.sna.2006.04.056

Cited by 71 publications

(47 citation statements)

References 8 publications

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“…Based on literature, square shape membrane is capable of providing high stress areas, as high as 1.64 times as compared to a circular one (Berns et al, 2006). Mathematical modeling is the first major step of the design with an aim of determining the membrane thickness and side length that can perform pressure measuring task for the specified range.…”

Section: Mems Foot Presure Sensormentioning

confidence: 99%

MEMS Biomedical Sensor for Gait Analysis

Wahab¹,

Bakar²

2011

Biomedical Engineering, Trends in Electronics, Communications and Software

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Section: Mems Foot Presure Sensormentioning

confidence: 99%

MEMS Biomedical Sensor for Gait Analysis

Wahab¹,

Bakar²

2011

Biomedical Engineering, Trends in Electronics, Communications and Software

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“…The design of MEMS piezoresistive pressure sensor extensively adopts finite element analysis (FEA) to realize stress distribution for reliability, sensitivity, and non-linearity [2]. Most of the piezoresistive pressure sensors use silicon as a diaphragm and piezoresistive property of silicon or polycrystalline silicon to sense the pressure [3][4][5]. A silicon MEMS pressure sensor which changes the capacitance as a sensing mechanism has been widely reported [6][7][8].…”

Section: Introductionmentioning

confidence: 99%

Computer aided modeling for a miniature silicon-on-insulator MEMS piezoresistive pressure sensor

Komaragiri

2015

Photonic Sens

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Abstract:The silicon-on-insulator diaphragm structure is a combined structure of the silicon dioxide and silicon layer. This work presents a new method to estimate the deflection response of silicon with that of a silicon-on-insulator (SOI) diaphragm structure, based on the burst pressure design approach. It also evaluates the output voltage of the diaphragm under two different conditions, flipped and un-flipped. The new modified analytical model developed and presented in this paper for describing the load deflection of SOI diaphragm is able to predict the deflection accurately when compared with the results obtained by finite element analysis CoventorWare®.Keywords: Micro electro mechanical system (MEMS), finite element analysis (FEA), stacked diaphragm, sensitivity Citation: K.

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“…To date, arrays of either MEMS or traditional microphones that have been applied to TBL measurements have been limited to 4 to 24 element arrays, with minimum spacing on the order of 5 mm (e.g. Blake and Chase, Farabee and Geib, Bhat, Berns, et al, Arnold, et al [2], [3], [8]- [10]). In the current work a microphone array on a chip is described which consists of 64 elements, with a center-to-center pitch of 1.26 mm in the flow direction, and 1.11 mm in the cross-flow direction.…”

Section: Introductionmentioning

confidence: 99%

A Microphone Array on a Chip for High Spatial Resolution Measurements of Turbulence

Krause

Gallman

Moeller

et al. 2014

J. Microelectromech. Syst.

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A microelectromechanical systems-based microphone array on a chip has been developed and applied to aeroacoustic measurements. The array is designed to measure the fluctuating pressures present under a turbulent boundary layer (TBL). Each chip measures 1 cm 2 and contains 64 individually addressable capacitively sensed microphones, with a center to center pitch of ∼1.25 mm. Surface topology, including the packaging, is kept to less than 0.13 mm. Element-to-element sensitivity variation in the array is less than ±2.5 dB from least to most sensitive, and phase variation is less than ±6.5°( at 1 kHz). The microphone 3-dB bandwidth is 700 Hz to 200 kHz, and the microphones are linear to better than 0.3% at sound pressure levels up to 150-dB SPL. A unique switched architecture system electronics and packaging method are employed to reduce data acquisition channel count requirements, and to maintain a low surface roughness. The array has been applied to the measurement of single point turbulence spectra under a flat plate TBL in a flow duct at Mach numbers up to 0.6 and Reynolds numbers based on plate length of 10 7 .

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AeroMEMS sensor array for high-resolution wall pressure measurements

Cited by 71 publications

References 8 publications

MEMS Biomedical Sensor for Gait Analysis

MEMS Biomedical Sensor for Gait Analysis

Computer aided modeling for a miniature silicon-on-insulator MEMS piezoresistive pressure sensor

A Microphone Array on a Chip for High Spatial Resolution Measurements of Turbulence

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