AETHER: A simulation platform for inductively coupled plasma

In this study, a hybrid mathematical model of a low-pressure RF plasma jet in transition mode between continuum and free molecular flow at a Knudsen number of 8·10−3 ≤ Kn ≤ 7·10−2 for a carrying gas is described. The model takes electrons, ions, metastable atoms, and potential and curl electromagnetic fields into account. The model is based on both a statistical approach for the atoms in the ground state and a continuum model for other components. The results of plasma flow calculations in an undisturbed jet are described. The distributions of the electrodynamic and electrostatic parts of the electric field are given. It has been observed that the plasma jet has a layered structure along the stream: a positive charge region is formed at the beginning of the jet, followed by a negative charge region, and then a positive one again. The reason for the formation of a layered structure is the fast flow expansion when the plasma inflows into the vacuum and the difference in electron and ion pulse.

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“…e early works [7][8][9] used to support the findings of this study are available from the corresponding author upon request.…”

Section: Data Availabilitymentioning

confidence: 99%

“…Maxwell's equations are usually reduced to vector and scalar potential equations [9] or reduced to a wave equation [10] or analyzed in conditions of neglecting the radial components of the magnetic field [11]. Poisson's equation is used for calculation of the electric field strength in [7,8].…”

Section: Introductionmentioning

confidence: 99%

Mathematical Modelling of RF Plasma Flow at Low Pressures with 3D Electromagnetic Field

Shemakhin

Желтухин

2019

Advances in Materials Science and Engineering

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“…Recent work has shown applicability of the built-in plasma module of the COMSOL® commercial FEM code (also based on local thermodynamic equilibrium (LTE) assumption) for 2D axi-symmetric simulations [29]. Some research groups have developed their custom codes to solve coupled CFD-electromagnetic problems in simplified 2D geometries of plasma torches [30][31][32].…”

Section: Introductionmentioning

confidence: 99%

An experimentally verified three-dimensional non-stationary fluid model of unloaded atmospheric pressure inductively coupled plasmas

Tsivilskiy¹,

Gil'mutdinov²,

Никифоров³

et al. 2020

J. Phys. D: Appl. Phys.

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A three-dimensional non-stationary numerical model of spectrochemical and technological inductively coupled plasma (ICP) systems is presented in the paper. The model considers the ICP as a gaseous media (with temperature-dependent electric conductivity) interacting with electromagnetic field generated by inductive coil. The model is based on simultaneous solution of the Maxwell’s and gas flow equations together with the energy equation coupled-together by corresponding source terms and material properties to take into account inductive current forming within the carrier gas and subsequent Joule heating, the Lorentz force and how does it affect the gas flow pattern. It allows calculation of temporal evolution of three-dimensional distributions of electromagnetic fields, pressure, gas velocity and temperature within a plasma torch and a condensation chamber used for powder processing. The model is applicable for simulation of atmospheric pressure electrodeless plasmas under local thermodynamic equilibrium that consist of pure gases and their mixtures. Such operating conditions are typical for ICPs that are used for elemental analysis and technological powder processing. Special attention is paid to experimental verification of the model. The simulation results are cross-verified for both types of ICPs (spectrochemical and technological one) using high-speed optical and schlieren visualization of gas flows. The discrepancy between calculations and experimental data does not exceed 10%.

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“…In general, the ICP discharge depends on the RF power, discharge chamber geometry parameter, discharge reaction type and the coupling of the plasma and RF power. At present, the mainstream simulation models are the 0D analytic model [1], the fluid model [2][3][4][5][6][7][8][9][10], the PIC-MCC model [11,12] and the hybrid model [4,[13][14][15][16]. The 0D analytic model is simple and easy to implement, but it can only be used to solve the global variables.…”

Section: Introductionmentioning

confidence: 99%

“…The 0D analytic model is simple and easy to implement, but it can only be used to solve the global variables. The fluid model is suitable to solve the multi-dimensions' discharge parameters, while the applicability (should be estimated according to Knudsen number [9]) is limited at the low pressure. The dynamic model is the most accurate, except the time cost is high.…”

Section: Introductionmentioning

confidence: 99%

Numerical research of a 2D axial symmetry hybrid model for the radio-frequency ion thruster

Wu¹,

Sun²,

Zuo³

et al. 2018

Plasma Sci. Technol.

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Since the high efficiency discharge is critical to the radio-frequency ion thruster (RIT), a 2D axial symmetry hybrid model has been developed to study the plasma evolution of RIT. The fluid method and the drift energy correction of the electron energy distribution function (EEDF) are applied to the analysis of the RIT discharge. In the meantime, the PIC-MCC method is used to investigate the ion beam current extraction character for the plasma plume region. The beam current simulation results, with the hybrid model, agree well with the experimental results, and the error is lower than 11%, which shows the validity of the model. The further study shows there is an optimal ratio for the radio-frequency (RF) power and the beam current extraction power under the fixed RIT configuration. And the beam extraction efficiency will decrease when the discharge efficiency beyond a certain threshold (about 87 W). As the input parameters of the hybrid model are all the design values, it can be directly used to the optimum design for other kinds of RITs and radio-frequency ion sources.

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AETHER: A simulation platform for inductively coupled plasma

Cited by 12 publications

References 32 publications

Mathematical Modelling of RF Plasma Flow at Low Pressures with 3D Electromagnetic Field

Mathematical Modelling of RF Plasma Flow at Low Pressures with 3D Electromagnetic Field

An experimentally verified three-dimensional non-stationary fluid model of unloaded atmospheric pressure inductively coupled plasmas

Numerical research of a 2D axial symmetry hybrid model for the radio-frequency ion thruster

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