Mathematical Modelling of RF Plasma Flow at Low Pressures with 3D Electromagnetic Field

Abstract

In this study, a hybrid mathematical model of a low-pressure RF plasma jet in transition mode between continuum and free molecular flow at a Knudsen number of 8·10−3 ≤ Kn ≤ 7·10−2 for a carrying gas is described. The model takes electrons, ions, metastable atoms, and potential and curl electromagnetic fields into account. The model is based on both a statistical approach for the atoms in the ground state and a continuum model for other components. The results of plasma flow calculations in an undisturbed jet are described. The distributions of the electrodynamic and electrostatic parts of the electric field are given. It has been observed that the plasma jet has a layered structure along the stream: a positive charge region is formed at the beginning of the jet, followed by a negative charge region, and then a positive one again. The reason for the formation of a layered structure is the fast flow expansion when the plasma inflows into the vacuum and the difference in electron and ion pulse.

Frequency dependencies of the characteristics of an inductively coupled radiofrequency discharge at reduced pressure

“…Also it is important to note examples of numerical models: an one-dimensional model in which the system of ICP equations is solved as an eigenvalue problem [30]; RF plasma simulation with chamber using OpenFOAM [31][32][33]. These works consider the model of a plasma jet.…”

Experimental installation for study the low-power ICRF plasma at low pressures with equipment for experiment data synchronization

“…One of the advantages of this kind of plasmas is its temperature ("cold" plasma), so material surface is not heated to critical temperatures at processes ofplasma modification of different materials [3,4]. The installation will let us to verifyresults of mathematical simulation of nonlinear processes occurring in the low pressure RF plasma [5,6], as well as processes of interaction with a sample. Special attention is paid to synchronization of incoming data such as gas flow rate, gas pressure in a vacuum chamber, temperature, and electron energy distribution function (EEDF).…”

A mathematical model of an inductively coupled radio-frequency discharge at low pressure as nonlinear partial eigenproblem

“…In recent years, the inductive-coupled radio frequency (ICRF) discharge is wide studied [1,2]. Despite the abundance of works on the study of plasma physics the ICRF discharge in pressure range specified from 13.3 to 133 Pa remains unlit, the numerical study of which is the subject of this work.…”