Frequency dependencies of the characteristics of an inductively coupled radiofrequency discharge at reduced pressure

Abstract

The dependence of parameters of an inductively coupled RF plasma on the electromagnetic field frequency at reduced pressure (113 Pa) is studied. The study was carried out in a 2D axisymmetric time-dependent setting, implemented in the Comsol multiphysics software package using the Navier-Stokes equations, continuity equation for electron density, electron energy density equation, heat transfer equation, Maxwell and Poisson equations for electromagnetic fields. The distributions of the electron density, carrier gas temperature, electron temperature and ion density at the output of the discharge tube in dependence on electromagnetic field frequency are obtained.

Electron trapping efficiency of a magnetron sputtering cathode

“…This software has already presented its capability for simulating the plasma sources as well as the electromagnetic fields and the particle trajectories [55]. It has also been extensively used to simulate MS devices [56][57][58][59][60][61][62] and other types of plasma sources such as gliding arc discharge [63], vacuum arc discharge [64], plasma arc welding [65], atmospheric plasma jet [66][67][68], dielectric barrier discharge [69], capacitively coupled plasma [70], inductively coupled plasma [71], microwave plasma [72] and electron cyclotron resonance plasma [73,74].…”

A mathematical model of an inductively coupled radio-frequency discharge at low pressure as nonlinear partial eigenproblem

“…In recent years, the inductive-coupled radio frequency (ICRF) discharge is wide studied [1,2]. Despite the abundance of works on the study of plasma physics the ICRF discharge in pressure range specified from 13.3 to 133 Pa remains unlit, the numerical study of which is the subject of this work.…”