The article proposes a new approach to calculating the strength of the magnetic field on the inner wall of the discharge chamber, which is necessary to maintain a steady state of a low-pressure ICRF discharge. The model is treate as a nonlinear eigenproblem. The influence of the third type boundary conditions for electron density as well as and the nonlinear boundary conditions for electrical strength is considered. This approach makes it possible solving two problems of designing ICRF plasma torches: for a given electron density in the discharge find the magnetic field strength that ensures the maintenance of the discharge, or, conversely, at a given magnetic field strength, determine the value of the electron density that can be created in the discharge. In addition, the radial distributions of the electric and magnetic fields and the electron concentration can be determined.

The dependence of parameters of an inductively coupled RF plasma on the electromagnetic field frequency at reduced pressure (113 Pa) is studied. The study was carried out in a 2D axisymmetric time-dependent setting, implemented in the Comsol multiphysics software package using the Navier-Stokes equations, continuity equation for electron density, electron energy density equation, heat transfer equation, Maxwell and Poisson equations for electromagnetic fields. The distributions of the electron density, carrier gas temperature, electron temperature and ion density at the output of the discharge tube in dependence on electromagnetic field frequency are obtained.

An installation for numerical and experimental studies of low-pressure radio frequency plasma for surface modification of functional materials with equipment for data synchronization are presented. The equipment for data synchronization as well as intermediate results for plasma generation are showed.

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