Air-bearing position optimization based on dynamic characteristics of ultra-precision linear stages

Abstract

Air-bearings are installed between the stator and the mover of ultra-precision linear stages to suppress vibration and mechanical contact. Spring-damping elements are used to emulate the complex interaction of the finite element model (FEM) developed in this paper and the system dynamic behaviors are analyzed. Through the experimental modal test, the validity and reliability of the model are proven. However, the dynamic characteristics including mode frequency, mode shape, and response amplitude are obviously changed with the position of air-bearings. The combined optimization method is used to optimize the air-bearings position. The best and worst positions are obtained using the dynamic characteristic analysis. The method can be generalized to the connection position of different components in manufacture elements and to implement the system dynamic characteristics optimization when the connection position can be changed.

Research trends in China for macro-micro motion platform for microelectronics manufacturing industry

“…However, it does not involve speed and acceleration. Huazhong University of Science and Technology carried out a linear stroke and air flotation combined with large-stroke high-precision basic research on the lithography platform (He et al, 2007;Chen et al, 2008). In addition, Zhejiang University, Shanghai Jiaotong University, and Tianjin University have also carried out similar research work (Quan et al, 2007;Wang et al, 2008;Li et al, 2006).…”

Model reduction techniques for dynamics analysis of ultra-precision linear stage

“…Normally, the response analysis can identify the contribution of the modes with the greatest influence on the overall amplitude and phase at selected frequencies. The frequency response analysis has Hz [8] more information than the eigenvalue analysis in the system dynamics characteristic study. The acceleration response of the ultra-precision linear stage is shown in Fig.…”

“…System vibration models are seldom studied for their complexity and strong internal coupling. Unlike the others [4,[6][7][8], this paper focuses on the model development, analysis, reduction, and experimentation of the ultra-precision linear stage. Spring-damping elements are used to emulate the complex interaction between the stator and the translator based on the finite element model.…”

“…9Frequency spectrum pattern of ultra-precision linear stage[8] Xuedong CHEN et al Dynamics analysis of ultra-precision linear stage…”