Air Damping Analysis in Comb Microaccelerometer

Zhou, Wu; Chen, Yu; Peng, Bei; Ye, Hui; Yu, Huijun; Liu, Heng; He, Xiaoping

doi:10.1155/2014/373172

Cited by 21 publications

(13 citation statements)

References 14 publications

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“…For 3D problems, the need to consider rotations about arbitrary directions in space would be generally imply the introduction of bending strains also, which will be investigated in future. Another problem is to deal with the temperature effect of the cable structures including the air damping [27], which is very complex and difficult issue.…”

Section: Discussionmentioning

confidence: 99%

Effects of thermal loading on the deployment of four-bar linkages for retractable roof structures

Cai¹,

Deng²,

Zhao³

et al. 2017

mech

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Section: Discussionmentioning

confidence: 99%

Effects of thermal loading on the deployment of four-bar linkages for retractable roof structures

Cai¹,

Deng²,

Zhao³

et al. 2017

mech

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“…b Comparison of three different sensors based on magnetic frequency characterization in air. All sensors present both the fundamental and torsional modes, with some variability in the resonant frequencies and quality factors elastic damping of the thin air gap results in stiffening of the structures and nonlinear effects 36 . Case 2 When shielded in air (case 2), the X-axis reaches a lower resolution (from 1.1 nT cm −1 in case 1 to 700 pT cm −1 in case 2), while the Y-axis remains the same.…”

Section: Resolution-limiting Noisementioning

confidence: 99%

100 pT/cm single-point MEMS magnetic gradiometer from a commercial accelerometer

et al. 2020

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Magnetic sensing is present in our everyday interactions with consumer electronics and demonstrates the potential for the measurement of extremely weak biomagnetic fields, such as those of the heart and brain. In this work, we leverage the many benefits of microelectromechanical system (MEMS) devices to fabricate a small, low-power, and inexpensive sensor whose resolution is in the range of biomagnetic fields. At present, biomagnetic fields are measured only by expensive mechanisms such as optical pumping and superconducting quantum interference devices (SQUIDs), suggesting a large opportunity for MEMS technology in this work. The prototype fabrication is achieved by assembling micro-objects, including a permanent micromagnet, onto a postrelease commercial MEMS accelerometer using a pick-and-place technique. With this system, we demonstrate a room-temperature MEMS magnetic gradiometer. In air, the sensor's response is linear, with a resolution of 1.1 nT cm −1 , spans over 3 decades of dynamic range to 4.6 µT cm −1 , and is capable of off-resonance measurements at low frequencies. In a 1 mTorr vacuum with 20 dB magnetic shielding, the sensor achieves a 100 pT cm −1 resolution at resonance. This resolution represents a 30-fold improvement compared with that of MEMS magnetometer technology and a 1000-fold improvement compared with that of MEMS gradiometer technology. The sensor is capable of a small spatial resolution with a magnetic sensing element of 0.25 mm along its sensitive axis, a >4-fold improvement compared with that of MEMS gradiometer technology. The calculated noise floor of this platform is 110 fT cm −1 Hz −1/2 , and thus, these devices hold promise for both magnetocardiography (MCG) and magnetoencephalography (MEG) applications.

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“…48 Thus, for any realistic acceleration force we do in our devices not expect delamination of the graphene from the substrate or the proof mass. Compared to state-of-theart silicon MEMS accelerometers, our NEMS accelerometer structures feature at least three orders of magnitude smaller proof masses, [49][50][51][52][53][54] while still providing useful output signals.…”

Section: Mems Nems Accelerometersmentioning

confidence: 99%

Suspended Graphene Membranes with Attached Silicon Proof Masses as Piezoresistive Nanoelectromechanical Systems Accelerometers

et al. 2019

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Graphene is an atomically thin material that features unique electrical and mechanical properties, which makes it an extremely promising material for future nanoelectromechanical systems (NEMS). Recently, basic NEMS accelerometer functionality has been demonstrated by utilizing piezoresistive graphene ribbons with suspended silicon proof masses. However, the proposed graphene ribbons have limitations regarding mechanical robustness, manufacturing yield, and the maximum measurement current that can be applied across the ribbons. Here, we report on suspended graphene membranes that are fully clamped at their circumference and have attached silicon proof masses. We demonstrate their utility as piezoresistive NEMS accelerometers, and they are found to be more robust, have longer life span and higher manufacturing yield, can withstand higher measurement currents, and are able to suspend larger silicon proof masses, as compared to the previous graphene ribbon devices. These findings are an important step toward bringing ultraminiaturized piezoresistive graphene NEMS closer toward deployment in emerging applications such as in wearable electronics, biomedical implants, and internet of things (IoT) devices.

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Air Damping Analysis in Comb Microaccelerometer

Cited by 21 publications

References 14 publications

Effects of thermal loading on the deployment of four-bar linkages for retractable roof structures

Effects of thermal loading on the deployment of four-bar linkages for retractable roof structures

100 pT/cm single-point MEMS magnetic gradiometer from a commercial accelerometer

Suspended Graphene Membranes with Attached Silicon Proof Masses as Piezoresistive Nanoelectromechanical Systems Accelerometers

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