AlGaAs Photonic Integrated Circuits Fabricated Using Chemically Assisted Ion Beam Etching

Grande, William J.; Johnson, J.E.; Tang, Chunrong

doi:10.1109/leos.1990.690599

LEOS '90. Conference Proceedings IEEE Lasers and Electro-Optics Society 1990 Annual Meeting

DOI: 10.1109/leos.1990.690599

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AlGaAs Photonic Integrated Circuits Fabricated Using Chemically Assisted Ion Beam Etching

William J. Grande

J.E. Johnson²,

Chunrong Tang³

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AlGaAs Photonic Integrated Circuits Fabricated Using Chemically Assisted Ion Beam Etching

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