2009 16th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits 2009
DOI: 10.1109/ipfa.2009.5232638
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AlGaN/GaN HEMT device structure optimization design

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Cited by 5 publications
(2 citation statements)
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“…The epitaxial layer consists of an unintentionally doped 1.5 m GaN buffer layer, 1 nm AlN spacer layer, 4 nm low Al component Al 0.04 Ga 0.96 N, and a 20 nm Al 0.27 Ga 0.73 N barrier layer as shown in Figure 1. Epitaxial layer structure of Al 0.27 Ga 0.73 N/AlN/Al 0.04 Ga 0.96 N/ GaN HEMT is proposed and optimized by combining theory calculation and TCAD software; detail design process is given in our previous papers [13,14]. An averaged electron mobility of 1800 cm 2 /(v⋅s) and a sheet carrier density of 1.0 × 10 13 /cm 2 are obtained by room temperature Hall measurement.…”
Section: Materials Preparation and Device Fabricationmentioning
confidence: 99%
“…The epitaxial layer consists of an unintentionally doped 1.5 m GaN buffer layer, 1 nm AlN spacer layer, 4 nm low Al component Al 0.04 Ga 0.96 N, and a 20 nm Al 0.27 Ga 0.73 N barrier layer as shown in Figure 1. Epitaxial layer structure of Al 0.27 Ga 0.73 N/AlN/Al 0.04 Ga 0.96 N/ GaN HEMT is proposed and optimized by combining theory calculation and TCAD software; detail design process is given in our previous papers [13,14]. An averaged electron mobility of 1800 cm 2 /(v⋅s) and a sheet carrier density of 1.0 × 10 13 /cm 2 are obtained by room temperature Hall measurement.…”
Section: Materials Preparation and Device Fabricationmentioning
confidence: 99%
“…Epitaxial layer structure of Al 0.27 Ga 0.73 N/AlN/ Al 0.04 Ga 0.96 N/GaN HEMT is proposed and optimized by combining theory calculation and TCAD software, detail design process is given in our previous papers [10,11]. Epitaxial layer structure of Al 0.27 Ga 0.73 N/AlN/ Al 0.04 Ga 0.96 N/GaN HEMT is proposed and optimized by combining theory calculation and TCAD software, detail design process is given in our previous papers [10,11].…”
Section: Device Design and Analysismentioning
confidence: 99%