2018
DOI: 10.1109/jsen.2018.2794264
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AlGaN/GaN Micro-Hall Effect Devices for Simultaneous Current and Temperature Measurements From Line Currents

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Cited by 40 publications
(23 citation statements)
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“…Similar to the sheet resistance, the mobility varies widely with temperature and decreases by a factor of 20 at 500 K compared to its value at 75 K (see Figure 15). The trend is in agreement with other surveys reported in literature on AlGaN/GaN-based Hall sensors [32,42,[48][49][50]. The estimated values of mobility are used to evaluate the geometrical correction factor.…”
Section: Estimated Mobilitysupporting
confidence: 90%
See 1 more Smart Citation
“…Similar to the sheet resistance, the mobility varies widely with temperature and decreases by a factor of 20 at 500 K compared to its value at 75 K (see Figure 15). The trend is in agreement with other surveys reported in literature on AlGaN/GaN-based Hall sensors [32,42,[48][49][50]. The estimated values of mobility are used to evaluate the geometrical correction factor.…”
Section: Estimated Mobilitysupporting
confidence: 90%
“…On sample 2, 30 nm of nickel (Ni) layer followed by 100 nm of gold (Au), is also deposited on top of a Ti/Al metal stack. The four layer metal stack of Ti/Al/ Ni/Au stack is more commonly used for good ohmic contacts to the 2DEG in AlGaN/GaN heterojunctions [25,32,42,50]. -5…”
Section: Metal Depositionmentioning
confidence: 99%
“…Although the Hall effect is very small in metallic conductors, the effect is enhanced when semi-conductors are used [134]. Indium arsenide (InAs), Gallium arsenide (GaAs) and Aluminium Gallium nitride or Gallium nitride AIGaN/GaN are typical materials used for the construction of Hall effectbased sensors [128], [135].…”
Section: ) Hall-effect Sensormentioning
confidence: 99%
“…Despite a bulk mobility lower than that of silicon, electrons in this 2DEG have a mobility of up to 2000 cm 2 /Vs, approximately 50% higher than that in silicon [5]. This lends itself to extremely sensitive MAGFETs [6] and Hall devices [7] in GaN that are attractive on account of their compatibility with integrated CMOS drivers for power management ICs in GaN [8].…”
Section: Introductionmentioning
confidence: 99%