Aligned, high-density semiconducting carbon nanotube arrays for high-performance electronics

Abstract

Single-walled carbon nanotubes (CNTs) may enable the fabrication of integrated circuits smaller than 10 nanometers, but this would require scalable production of dense and electronically pure semiconducting nanotube arrays on wafers. We developed a multiple dispersion and sorting process that resulted in extremely high semiconducting purity and a dimension-limited self-alignment (DLSA) procedure for preparing well-aligned CNT arrays (within alignment of 9 degrees) with a tunable density of 100 to 200 CNTs per micrometer on a 10-centimeter silicon wafer. Top-gate field-effect transistors (FETs) fabricated on the CNT array show better performance than that of commercial silicon metal oxide–semiconductor FETs with similar gate length, in particular an on-state current of 1.3 milliamperes per micrometer and a recorded transconductance of 0.9 millisiemens per micrometer for a power supply of 1 volt, while maintaining a low room-temperature subthreshold swing of <90 millivolts per decade using an ionic-liquid gate. Batch-fabricated top-gate five-stage ring oscillators exhibited a highest maximum oscillating frequency of >8 gigahertz.

Separation of Semiconducting Carbon Nanotubes Using Conjugated Polymer Wrapping

“…They obtained a density of 150–200 SWNTs μm −1 , and a current density of 10.08 μA/μm at V DS = −1 V, which is 45 times higher than that of the random SWNT network. Recently, Peng et al achieved a wafer-scale alignment of SWNTs using a dimension-limited self-alignment (DLSA) method ( Figure 11 c) [ 150 ]. They were able to prepare SWNT arrays with a density of 100–200 SWNTs μm −1 by adjusting the concentration of the carbon tube solution.…”

Diameter controlled growth of single-walled carbon nanotubes

“…目前, 生长高半导体性纯度、高密度的碳纳米 管平行阵列, 仍然是极富挑战性的问题. 高纯度单一手性的碳纳米管在电子学与光电子学 器件 [123,124] 、生物传感与成像 [125,126] 、量子信息处 理 Growth window is divided into three regions and the middle one is suitable for growth (color online).…”

A Universal Method for High‐Efficiency Immobilization of Semiconducting Carbon Nanotubes toward Fully Printed Paper‐Based Electronics

“…Furthermore, these SAMs are mostly used to immobilize water‐based sc‐SWCNTs. Compared with water‐based sc‐SWCNTs, conjugated polymer‐sorted sc‐SWCNTs have higher purity (the purity can reach 99.9999%) [ 30 ] and better electrical properties due to the absence of ionic or nonionic surfactants in sc‐SWCNT networks. [ 31–33 ] Therefore, developing a universal method to effectively deposit conjugated polymer‐sorted sc‐SWCNTs on various substrates is necessary for obtaining high‐performance SWCNT TFTs.…”