2021
DOI: 10.1088/1742-6596/1838/1/012001
|View full text |Cite
|
Sign up to set email alerts
|

All-Dielectric Metasurface Refractive Index Sensor with Microfluidics

Abstract: Magnetic resonance and electrical resonance can be excited simultaneously by the incident light source in high refractive index all-dielectric metasurfaces. They can manipulate light waves to a certain extent and can be used in many fields. Silicon is widely used in all-dielectric metasurfaces due to its high refractive index and low loss in near infrared range. In this paper, we use silicon nanodisk structure as refractive index sensor and PDMS microfluidic channels as detection channels to realize liquid ref… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1

Citation Types

0
1
0

Year Published

2023
2023
2024
2024

Publication Types

Select...
3

Relationship

0
3

Authors

Journals

citations
Cited by 3 publications
(1 citation statement)
references
References 7 publications
0
1
0
Order By: Relevance
“…It may further realize the fully chip-integrated optical sensing and detecting functions and be readily integrated with numerous functionalities [ 10 ]. The silicon material device technology is established, affordable, and compatible with the CMOS process [ 38 , 39 ]. Thus, researchers’ interest has been drawn to silicon-based high refractive index sensor chips.…”
Section: Introductionmentioning
confidence: 99%
“…It may further realize the fully chip-integrated optical sensing and detecting functions and be readily integrated with numerous functionalities [ 10 ]. The silicon material device technology is established, affordable, and compatible with the CMOS process [ 38 , 39 ]. Thus, researchers’ interest has been drawn to silicon-based high refractive index sensor chips.…”
Section: Introductionmentioning
confidence: 99%