paradigm in reconfi gurable metasurfacebased optics. Here, we use electromagnetics and device simulations to design electrically pumped semiconductor heterostructure resonators capable of arbitrarily tuning the refl ection phase of infrared light with little change in amplitude.Previous approaches for tuning metasurfaces-using metallic resonators coupled to an index tunable background [ 8,[23][24][25][26][27][28] or mechanically changing the shape of metallic resonators [ 5,29,30 ] have been unable to achieve reconfi gurable 2π phase shifts. This inability to achieve 2π phase control stems fundamentally from the nature of the underlying optical antennas. Because the light-matter interaction lengths are subwavelength and the quality factors modest ( Q ≈ 1−10), very large refractive index modulation is needed (Δ n ≥ 1). InSb [31][32][33] or InAs [ 27,34,35 ] support free-carrier index shifts of this magnitude due to their high mobility and low electron effective mass. In our previous theory work, [ 36 ] we demonstrated full 2π tuning of the transmission phase of semiconductor metasurface by modulating the carrier concentration in InSb resonators between 10 17 -10 18 cm −3 . However, we did not consider how to achieve such modulation. Here, we use combined electromagnetic [ 37 ] and device simulations to demonstrate subwavelength 1D heterojunction device resonators with electrically reconfi gurable refl ection phase. We fi rst demonstrate a new resonator geometry that allows for integration of metal electrodes with dielectric-type Mie resonances. Subsequently, we incorporate an InSb based heterojunction device layer into the resonator architecture. This novel device design employs electron and hole blocking layers to achieve large modulations of carrier concentration over electrically large dimensions, enabling near-2π tuning of refl ection phase with minimal changes in refl ection amplitude. Finally, we demonstrate fully continuous and tunable steering of high-quality narrow, diffraction lobes in resonator arrays.
Results and DiscussionGiven the need for integrating top and bottom electrical contacts, our basic metasurface element is a modifi ed version of a 1D "strip" resonator sitting atop a refl ecting back electrode shown in