“…[21] The limited experimental studies on contact engineering for 2D Te require further investigation to develop a fundamental understanding and enhance device performance.Because the intrinsic chain structure of Te prefers onedimensional (1D) growth behavior, it is still very difficult to grow ultrathin 2D Te samples. [7,16,17,22] It is quite necessary to develop a method to reduce the thickness of the Te channel for better electrostatic control. The reported dry-etching methods, including plasma treatment, [23] thermal annealing, [24] UV/ozone treatment, [25] and local laser thinning, [26,27] can achieve selective patterning and layer-by-layer thinning of typical 2D materials (e.g., TMDs and BP), but the high energy applied to the samples can easily damage the bottom layers, which results in defects or disorders in the 2D materials.…”